| MACHINE NAME | IT DOES: | AREA: |
ALD  |
Atomic layer deposition | vacuum deposition |
| ALD-Oxford |
Atomic layer deposition | vacuum deposition |
| AME5000 | Si/Nitride dry etcher | plasma etch |
| asher | plasma PR stripper | photo stripper |
| centura | oxide dry etcher |
vacuum deposition |
| CMP | CMP for oxide, nitride, Si | |
| coater6 | photoresist coat and developer tracks | photolithography |
| concept1 | dielectric plasma dep | vacuum deposition |
| e-beam | CMOS metal evaporator | vacuum deposition |
| endura | metal sputtering system | |
| GnP | chemical mechanical polisher | |
| hmds | resist vapor primer | photolithography |
| i-stepper | reticle design guide |
wafer stepper | photolithography |
| LAM490B (poly) | poly dry etcher | etch |
| LAM590-ICL | plasma etcher | etch |
| nitride | wet station | photolithography |
| oxford-100 | Plasma Etch Tool | vacuum deposition |
| oxide | wet station | photolithography |
| pan-etch | wet station | etch |
| pre-metal | wet station | vacuum deposition |
| rainbow (metal) | metal dry etcher |
plasma etch |
| rca |
wet station | diffusion |
| RTA-NoMetal |
rapid thermal processing | |
| RTA-Pieces |
rapid thermal processing | |
| semZeiss | high-resolution scanning electron microscope | photo bay |
| TMAH-KOHhood | wet station | wet |
| tube5A-gateox | atmospheric diffusion tube | diffusion |
| tube5B-anneal | atmospheric diffusion tube | diffusion |
| tube5C-thickox | atmospheric diffusion tube | diffusion |
| tube5D-fieldox | atmospheric diffusion tube | diffusion |
| tube6A-npoly | low P diffusion tube | diffusion |
| tube6B-thickpoly | low P diffusion tube | diffusion |
| tube6C-LTO | low P diffusion tube | diffusion |
| tube6D-nitride | low P diffusion tube | diffusion |
| UV1280 | spectroscopic ellipsometer | metrology |
| VTR | low-stress nitride | diffusion |
| MTL-ICLPC2.MIT.EDU | image capture device on machine | metrology |
| wirebonder | wire bonder |