Introduction: |
THERMCO tube5C-Thickoxe Furnace
is an Atmospheric furnace designated to grow thermal Silicon
Dioxide in the temperature range of 500 1100 °C,
on Silicon wafers up to 6 inch in diameter. Other CMOS compatible
thermal processes could run too. The system is equipped with
an external Persys pyrogenic torch, that allows wet oxidation
at temperatures bellow the pyrogenic reaction limit. This furnace
has a 40 long flat temperature profile within +/- 1C.
The high H2 and O2 flow capability makes
the system more suitable for growing thick SiO2 films. (up
to 1 um). The following gases are available:
Nitrogen 20 SLM
Oxygen 20 SLM
Oxygen 2 SLM
HYDROGEN 20 SLM (interlocked with Oxygen flow)
TCA (C2H2Cl2) 500 sccm (interlocked with Oxygen flow)
The THERMCO furnace is controlled by the TMX tube computer; while the
SEMY supervisor system is
used to monitor the system and to edit and store the process recipes.
The THERMCO tube5c-thickox horizontal furnace is for CMOS
process only.
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Procedure: |
- Engage in CORAL for ICL tube5c-thickox
before you start. The wafers should have been RCA cleaned
less than 4 hours before and your process must be approved
by the PTC.
- Pull the tube boat out as follows:
- On the SEMY terminal double click on RUN ; the Minispec
Loader pops up on the screen.
- From the OPTION/ TUBE menu choose 5C
- Click on File/Open menu , select the BOAT_OUT minispec
and click OK
- On Minispec Loader window click Compile & Send; Compile
Status window will be show up.
Wait until the OK button is active, then click on it: the recipe was
successfully sent to the TMX tube
computer.
Note: The tube should be in Standby mode to accept
a new recipe; if it is in Complete status, push the STOP button
on the tube TMX display to bring the system in Standby mode.
Open the Tube Status from the Semy pallete; from Option/Tube select 5C,
and from Display select Detail. Check in the right top corner if the BOAT_OUT minispec
was downloaded to the tube; the minispec listed there will be processed
when you will push the START button.
- On the tube TMX display push the START button; the system
will go in Processing mode, and the boat will come out in 10 minutes.
- Pull the central quartz boat from the tube paddle Using
the pick up tool, place it on the designated 5C transfer
quartz plate, and place your wafers and the monitors in the
quartz boat. Place the quartz boat back in the central position
on the tube paddle, with the wafers front side facing the
Load Zone end.
- Start the processing recipe, by following these steps:
- On the SEMY terminal double click on RUN icon; the Minispec
Loader pops up on the screen.
- From the OPTION/ TUBE menu choose 5C
- Click on File/Open menu , select the minispec and click OK. (For
example if you want to do a 1050C variable time wet oxidation select 1050C
WET TUBE3 VAR minispec)
- On Minispec Loader window click Compile & Send; the Compile
Status window and the Variable Delay Entry window will show up. On
the Variable Delay Entry window input the deposition time and push ENTER,
input the deposition time again to confirm and wait until the OK button
on the Compiler Status window is active, then click on it: the recipe
was successfully sent to TMX tube computer.
Note: The tube should be in Standby mode to accept a new
recipe; if it is in Complete status, push the STOP button
on the tube TMX display to bring the system in Standby mode.
Open the Tube Status from the Semy pallete; from Option/Tube select 5C,
and from Display select Detail. Check in the right top corner if the
right minispec was downloaded to the tube; the minispec listed there
will be processed when you will push the START button
- On the TMX tube display push START button, the system
will go in Processing mode.
- When the process is finished, take the quartz boat from
the tube paddle, Using the pick up tool and place it on the
designated transfer quartz plate. Remove your process wafers
and monitor wafers from the quartz boat. Place the quartz
boat back on tube paddle and put the boat in by following
these steps:
- On the SEMY terminal double click on RUN icon; the Minispec
Loader pops up on the screen.
- From the OPTION/ TUBE menu choose 5C
- Click on File/Open menu , select the BOAT_IN minispec
and click OK
- On Minispec Loader window click Compile & Send: the
Compile Status window shows up.
Wait until the OK button is active, then click on it: the recipe was
successfully sent to the TMX tube Computer.
Note: The tube should be in Standby mode to accept a new
recipe; if it is in Complete status, push the STOP button
on the tube TMX display to bring the system in Standby mode.
Open the Tube Status from the Semy pallete; from Option/Tube select 5C,
and from Display select Detail. Check in the right top corner if the BOAT_IN minispec
was downloaded to the tube; the minispec listed there will be processed
when you will push the START button
- On the tube TMX display push the START button; the system
will go in Processing mode, and the boat will start going in.
- "Disengage" the machine in CORAL,
after you input the test data from the monitor wafers into
the comments section window.
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