Introduction:
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THERMCO tube5b-anneal Furnace is an Atmospheric furnace
designated to grow thermal Silicon Dioxide in the temperature range
of 800 1100 C, on Silicon wafers up to 6 inch in diameter.
Other CMOS compatible thermal processes could run too. The system
is equipped with an internal Pyrogenic torch and the Pyrogenic reaction
is allowed for temperatures higher than 800C only. The system is
designated for high temperature anneal and grow of thermal SiO2
films in the thickness range of 20A to 5000 A: the internal injector
configuration makes difficult for the furnace to grow thick uniform
thermal oxides. This furnace has a 40 long flat temperature
profile within +/- 1C.
The following gases are available:
Nitrogen: 20 SLM
Oxygen: 20 SLM
Oxygen: 2 SLM
HYDROGEN: 20 SLM (interlocked with Oxygen flow)
TCA (C2H2Cl2): 500 sccm (interlocked with Oxygen flow)
The THERMCO furnace is controlled by the TMX tube computer; while
the SEMY supervisor system is
used to monitor the system and to edit and store the process recipes.
The THERMCO tube5b-anneal horizontal furnace is for CMOS
process only.
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Procedure:
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- Do Engage command in CORAL for ICL tube5b-anneal
machine, before you start. The wafers should have been RCA cleaned
less than 4 hours before and your process must be approved
by the PTC.
- Pull the tube boat out as follows:
- On the SEMY terminal double click on RUN ; the Minispec
Loader pops up on the screen.
- From the OPTION/ TUBE menu choose 5B
- Click on File/Open menu , select the BOAT_OUT minispec
and click OK
- On Minispec Loader window click Compile & Send;
Compile Status window will be show up.
Wait until the OK button is active, then click on it: the recipe
was successfully sent to the TMX tube
computer.
Note: The tube should be in Standby mode to
accept a new recipe; if it is in Complete status,
push the STOP button on the tube TMX display to bring
the system in Standby mode. Open the Tube Status
from the Semy pallete; from Option/Tube select 5B,
and from Display select Detail. Check in the right top corner
if the BOAT_OUT minispec was downloaded to the tube;
the minispec listed there will be processed when you will push
the START button.
- On the tube TMX display push the START button; the
system will go in Processing mode, and the
boat will come out in 10 minutes.
- Pull the central quartz boat from the tube paddle Using the
pick up tool, place it on the designated 5B transfer quartz plate,
and place your wafers and the monitors in the quartz boat. Place
the quartz boat back in the central position on the tube paddle,
with the wafers front side facing the Load Zone end.
- Start the processing recipe, by following these steps:
- On the SEMY terminal double click on RUN icon; the
Minispec Loader pops up on the screen.
- From the OPTION/ TUBE menu choose 5B
- Click on File/Open menu , select the minispec and click OK.
(For example if you want to do a 1000C variable time wet oxidation
select 2W1000 minispec, or 2D1000 minispec
for a dry Oxidation, variable time process at 1000C, etc)
- On Minispec Loader window click Compile & Send; the
Compile Status window and the Variable Delay Entry window will
show up. On the Variable Delay Entry window input the deposition
time and push ENTER, input the deposition time again
to confirm and wait until the OK button on the Compiler Status
window is active, then click on it: the recipe was successfully
sent to TMX tube computer.
Note: The tube should be in Standby mode to
accept a new recipe; if it is in Complete status,
push the STOP button on the tube TMX display to bring
the system in Standby mode. Open the Tube Status
from the Semy pallete; from Option/Tube select 5B,
and from Display select Detail. Check in the right top corner
if the right minispec was downloaded to the tube; the minispec
listed there will be processed when you will push the START button
- On the TMX tube display push START button, the system
will go in Processing mode.
- When the process is finished, take the quartz boat from the
tube paddle, Using the pick up tool and place it on the designated
transfer quartz plate. Remove your process wafers and monitor
wafers from the quartz boat. Place the quartz boat back on tube
paddle and put the boat in by following these steps:
- On the SEMY terminal double click on RUN icon; the
Minispec Loader pops up on the screen.
- From the OPTION/ TUBE menu choose 5B
- Click on File/Open menu , select the BOAT_IN minispec
and click OK
- On Minispec Loader window click Compile & Send:
the Compile Status window shows up. Wait until the OK button is
active, then click on it: the recipe was successfully sent to
the TMX tube Computer.
Note: The tube should be in Standby mode to
accept a new recipe; if it is in Complete status,
push the STOP button on the tube TMX display to bring
the system in Standby mode. Open the Tube Status
from the Semy pallete; from Option/Tube select 5B,
and from Display select Detail. Check in the right top corner
if the BOAT_IN minispec was downloaded to the tube;
the minispec listed there will be processed when you will push
the START button
- On the tube TMX display push the START button; the
system will go in Processing mode, and the
boat will start going in.
- Disengage session in CORAL, after
you input the test data from the monitor wafers into
the comments section.
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