MTL Fabrication

Fab Fees

• No fab access fees
• Monthly fees for computer account ($30) & Identicard ($10)
• Machine use fees reflect mode of operation of tool
  (e.g., per batch, per wafer, per run + material)
  • based on Machine Charge Chart
  • use "process units" so can modify revenue maintaining relative tool costs
  • currently 1 process unit = $8.50, for Internal & Outreach members; see FFA for industrial members
  • Yearly "soft" cap – applies to Internal members only:
    • $24k for students ($48k for staff, post-docs, etc.) + 20% of incurred fabfees
    • includes precious metals and consumables
    • excludes masks, wafers, services not in MTL (i.e., ion implant, EBL, CMSE)

• Fab.nano Tools
• Overview
• Facilities
• Becoming an MTL Fab User
• New User Orientation
• MUMMS
• CORAL
• Outreach Program
• Fabrication Facilities Access
• Fast Facts for Fab Users
• Fab fees
• Machine Charge Chart
• SOPs
• Etch Tool Summary
• RTA Machines Summary
  
• Training Chart
• PTC Process Matrix
• Emergency Preparedness Guide
• Chemical Hygiene Plan