MTL Fabrication

By following the links below, you will prepare yourself for Using the fabrication facilities at MTL.

 

• Registration
  • Register for MUMMS
• Basics
• Lab facilities - overview
• Building floor plans
• Mode of Operation
• General Fab. Procedures
• Users Code of Conduct
• Machine Charge Chart
• Training Chart
• Safety
  • Safety Rules
  • Evacuation Procedure
  • Lab Attire
  • Chemicals in MTL
  • Commonly Used Gases in MTL
  • Hazardous Situations in MTL
• Facilities
  • Fab Facilities
  • How to Report Building Problems
• Inside the Lab
  • How to get your research lot started
  • How to obtain supplies
  • How to receive training on fab machines
  • Personal space in the lab
  • Photomasks
  • Ion Implants
  • Specialty Wafers
  • Useful Charts and Information
    • Diffusion
    • Metrology
    • Packaging
    • Photolithography
    • Vacuum
    • Wafer Cleans
    • TRL-Specific Issues
      • TRL Color Codes
    • EML-Specific Issues
• Computer Systems
  • CORAL - Common Object Representation for Advanced Laboratories

• Fab.nano Tools
• Overview
• Facilities
• Becoming an MTL Fab User
• New User Orientation
• MUMMS
• CORAL
• Outreach Program
• Fabrication Facilities Access
• Fast Facts for Fab Users
• Fab fees
• Machine Charge Chart
• SOPs
• Etch Tool Summary
• RTA Machines Summary
  
• Training Chart
• PTC Process Matrix
• Emergency Preparedness Guide
• Chemical Hygiene Plan