CORAL Name: | coater6 |
Model Number: | SSI-150 |
Location: | ICL |
What it does: | photoresist coat and develop tracks. |
Introduction: | The SSI150, named coater6, is a three tracks photoresist coat and develop system. The front track, track1, performs the resist coating functions while the center, track2, and rear, track3, perform the resist develop process. The user interface for operations and programming is by way of a keyboard and/or a softkeypad within the LCD display. Wafer operations are selected from recipes lists. Recipes are created by the user by editing a formatted recipe template. The operations display gives a real time status of all sections of the three tracks and gives descriptions and locations of all fault conditions. |
Safety: | Use caution when operating coater6 as there are mechanical pinch points and there are hot surfaces that may be exposed. The mechanical pinch points are:
Always wear safety glasses when in the ICL.
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Procedure: | Before Using this machine you must reserve
coater6 in CORAL. Coater: Developer:
The developers, tracks 2 & 3, have the same configuration…
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Author: | Paul Tierney, 9/02. <ptierneyt@mtl.mit.edu>, rev. 8/03 |