CORAL Name: | pre-metal |
Model Number: | Semifab Model WPS 400 Wet Process Station |
Location: | ICL |
What it does: | wet process station |
Introduction: | The pre-metal wet processing station is used primarily
to support two
processes, photoresist stripping, and cleaning of wafers prior to
metallization. It is strongly recommended that users read the MSDS
sheets for the chemicals used in these processes prior to Using them.
The MSDS sheets can be found in the yellow MSDS binders in the copier
room on the 2nd floor of Building 39. |
Safety: | Chemicals must be transported to and from the
pre-metal station Using
the chemical cart or single bottle plastic carrier. Handling chemical
bottles, beakers, or any other vessel must always be done with
dry gloved hands. |
Procedure: | 1. Check Equipment Reservations in CORAL to
insure that you reserved
the correct machine in the correct facility for the correct date. 2. Use the "Engage" command in CORAL
for the equipment that you
are about to use; use this command BEFORE you start the operation. a. acid apron - this garment is to be worn with the label 5. Select the proper tank. Use the tank marked with the blue label for resist stripping, and the tank with the green label for pre-metal cleaning. 6. Photoresist stripping and premetal cleaning have the same ratios of sulfuric acid to hydrogen peroxide, 3 to 1. a. pour hydrogen peroxide to the bottom of the teflon holder. b. pour sulfuric acid into the bath to the top mark on
the teflon
holder. 8. Using a vacuum wand, place your wafers into the cassette. PHOTORESIST STRIP: 12a. Proceed to step 14, below. PRE-METAL CLEAN: 11b. After the dump rinse cycle is completed, place your
wafers in the
50:1 HF bath for 1 minute; this removes approximately 100 A of
silicon dioxide. 12b. Place the cassette with your wafers into the same dump rinse tank that you used in step 10, and initiate the cycle. 13. After dump rinse cycle is completed, place your wafers
into the
spin rinse dryer for the final processing step. 14. Rinse the deck of the wet station to insure that no residual chemicals are left. 15. Use the glove rinser (one cycle per glove) to rinse your gloves. Dry them with a clean room wipe. 16. Return all chemical containers(full, partially full, and empty) to the "passthrough" Using the transport cart. Be sure that all bottles are dry. 17. Return the transport cart to the wet station. 18. Rinse and dry your gloves again, as in step 15. 19. Remove your protective garments and return them to the proper storage place. 20. End "Operate Machine" in CORAL.
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Author: | Bob Hamilton (UCB) 03/94; Joe Walsh 07/95 |