| CORAL
Name: |
centura |
| Model
Number: |
Applied Materials Centura 5200 |
| Location: |
ICL |
| What
it does: |
chemical vapop deposition |
| Introduction: |
The Centura CVD System is a fully automated Chemical
Vapor Deposition (CVD) Using single-wafer, multi-chamber design.
The system deposits thin dielectric films used in semiconductor
manufacturing on 6” (150mm) wafers. |
| Safety: |
The Load-lock cassette door closes under pneumatic
pressure. Avoid placing fingers or foreign objects between
the door and the chamber edge while the door is closing. Personal
injury or damage to the machine could result. |
| Procedure: |
- In CORAL Use the "ENGAGE" command
to get screen control of the system.
- Log In: This action must be done in
order to gain access to the system: Click under Applied
Materials CENTURA system 5200 title (top of the screen).
User
Name: USER <Enter> Password: USER <Enter>
Click
on PROCESSING
- Main Screen: Follow the drop-window sequence
bellow to access such screen: Wafer -> Monitor
Wafers
- Put System in Manual (Note: If the
system is already in manual, You can go to step-5. Manual
can be determined by the white color of the “System” and “Wafer” drop-windows)
If not in manual: From main screen: Wafer -> Stop -> System -> Control
System -> Automatic -> Manual
- Open Load Lock A: From Main Screen
(step-3): Wafer -> Load/unload
A.
- Loading your Wafers : Use the Cassette
from the load lock. Wafers ought to be placed in
every slot starting on slot #1
- Load Sequence:From Main Screen (step-3): -> System
--> Control System. Click
on Sequence Selection. Look for the desired
sequence (they are in alphabetical order)
- Close Load Lock:From Main Screen (step-3): Wafer -> Load/unload
A (it will take a few minutes for base
pressure and wafer mapping to take place)
- Put System in Automatic: From Main Screen
(step-3): System ->Control
system -> Manual -> Automatic -
Click on “confirm wafer position” red
title at the bottom.
- Start Your Run: From Main Screen (step-3): Wafer->RUN
- Finishing Your Run: NOTE: Wait
for the “Ready for Unload” to
be displayed by the Load Lock., before placing the
system in manual. (it will
take a few minutes after the last wafer is placed back
in the load lock)
- Put system in Manual: From Main Screen
(step-3): Wafer -> Stop -> System
-> Control System -> Automatic-> Manual.
- Remove your Wafers: From Main Screen (step-3): Wafer -> Load/unload
A.
- Close load lock: From Main Screen (step-3): Wafer -> Close
Door A.
- In CORAL Use the "DISENGAGE” to complete your
operation.
|
| Author: |
Paudely Zamora, Rev.
H, June
16, 2005 |
