CORAL Name: | LAM590-icl |
Model Number: | Autoetch |
Location: | ICL etch bay |
What it does: | Plasma Etches Silicon Nitride and Oxide |
Introduction: | The LAM590-ICL is a plasma etcher donated by Analog Devices Inc. It is a 6” tool but smaller substrates may be placed on a “handler” wafer. The LAM590-ICL etches Silicon Nitride and Oxide There are 5 gases, but only 4 are available for processing: Oxygen (O2), Helium (He), Trifluoromethane (CHF3), and Tetrafluoromethane (CF4). The Argon (Ar) is not used. |
Safety: | CAUTION: Do NOT remove any machine covers under any circumstances!!! NOTE: There is an On/Off switch on the keyboard to be used in case of emergency. This switch disables the power to the entire system (but not the vacuum pumps). Use this button in emergency situations!!! This switch should also be used if a wafer is going to be broken!!! In either case, notify the Staff immediately so the system can be checked!!! Due to the toxic nature of the processing gases, only qualified technical staff is allowed to perform the tasks of turning gases on and off and changing of gas cylinders. Keep your hands away from all moving parts. Do not try to defeat any of the system interlocks. If, while operating this machine you encounter an issue, report it immediately Using Coral as either a problem or a shutdown depending on its severity. The staff in charge will address it in a timely fashion.
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Procedure: | Check reservations in CORAL to insure that you reserved the correct machine in the correct facility for the correct date. Another user may have reservations; it is your responsibility to honor them, if this is the case. ‘Engage' the machine in CORAL for the equipment that you are about to use; use this command BEFORE you start the operation. Insure that the correct facility is set (ICL, TRL, etc.) and that your lot name is entered correctly." The CORAL switchbox light must be "ON" in order to enable the Start button!!! NOTE: Use the arrows (v, ^, >, <) to navigate the screen, and then push FIELD SELECT to toggle through the various choices If you have any etch/process problems
ALARMS: The etcher will alarm for the following malfunctions. SYSTEM FUNCTIONS: Status Page: This page is completely controlled by the computer. Monitors gas flow in sccm Recipe Page: The following variables are programmable. Step # Parameter Page: This page is used in conjunction with the Recipe page. There are 3 choices at the Parameter prompt: Machine, Endpoint, and LamLink. Machine: Endpoint: However, the operator can monitor the actual endpoint of the etch by looking at channel 18 (Filter D) |
Author: | R. Bicchieri, 8/12 |