TRL Rules | Read before Using TRL | |
TRL Acid and Solvent Wet Processing | General rules and guidelines for wet chemical processing in TRL. | |
Acidhood & Acidhood 2 Procedures and Rules | Lab procedure | |
MACHINE NAME | IT DOES: | AREA: |
IV-probe | DC probe station for device characterization. | |
acid-hood | wet station | photolithography |
acid-hood2 | wet station (NO Au) | photolithography |
aja-trl | ||
asher | plasma PR stripper | photo stripper |
ccnt | carbon nanotube deposition system | deposition |
develop-Brewer | wafer developing and post exposure baking | photolithography |
e-beam | metal evaporator | vacuum deposition |
ebeamFP | evaporative deposition system | vacuum deposition |
ellipsometerTRL | photolithography | |
EV1 | mask aligner | photolithography |
Evalign/Bond | wafer aligner/bonder | photolithography |
GrapheneBlackMagic | Mono-layer and multi-layer graphene deposition | 39-428a TRL |
greenflo | General purpose wet hood for processing with acids and bases. | TRL Outer Window Hallways |
HMDS | resist vapor primer | photolithography |
heidelberg | laser pattern transfer system | photolithography |
ksaligner-2 | mask aligner | photolithography |
lam590-trl | Plasma etcher | etch |
SU8spinner | specialty coater | photolithography |
perkin-elmer | sputter system | deposition |
photo-wet | wet station | photolithography |
plasmaquest | ECR pecvd-RIE | plasma etch |
PMMA spinner | spin coater | photolithography |
rca | wet station | diffusion |
RTA-HiT | rapid thermal processing | |
samco | inductively coupled plasma reactive ion etcher (ICP RIE) | etch |
Solvent-noAU | wet station | |
sts1 | Si deep trench etcher | etch |
sts2 | etcher | etch |
sts3 | etcher | etch |
-- Kapton Tape | ||
stscvd | deposition | |
Target mount | etch | |
tubeA1-CMOSox | atmospheric diffusion tube | diffusion |
tubeA2-wetox/bond | atmospheric diffusion tube | diffusion |
tubeA3-CMOSinter | atmospheric diffusion tube | diffusion |
tubeA4-organic bake | atmospheric diffusion tube | diffusion |
tubeB1-Au | atmospheric diffusion tube | diffusion |
tubeB2-ox/alloy | atmospheric diffusion tube | diffusion |
tubeB3-dryox/anneal | atmospheric diffusion tube | diffusion |
tubeB4-poly | low P diffusion tube | diffusion |
XeF2 | isotropic silicon etcher | etch |