TRL Rules | Read before Using TRL | |
TRL Acid and Solvent Wet Processing ![]() |
General rules and guidelines for wet chemical processing in TRL. | |
Acidhood & Acidhood 2 Procedures and Rules | Lab procedure | |
MACHINE NAME | IT DOES: | AREA: |
IV-probe ![]() |
DC probe station for device characterization. | |
acid-hood ![]() |
wet station | photolithography |
acid-hood2 | wet station (NO Au) | photolithography |
aja-trl ![]() |
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asher | plasma PR stripper | photo stripper |
ccnt ![]() |
carbon nanotube deposition system | deposition |
develop-Brewer ![]() |
wafer developing and post exposure baking | photolithography |
e-beam | metal evaporator | vacuum deposition |
ebeamFP ![]() |
evaporative deposition system | vacuum deposition |
ellipsometerTRL | photolithography | |
EV1 | mask aligner | photolithography |
Evalign/Bond | wafer aligner/bonder | photolithography |
GrapheneBlackMagic ![]() |
Mono-layer and multi-layer graphene deposition | 39-428a TRL |
greenflo ![]() |
General purpose wet hood for processing with acids and bases. | TRL Outer Window Hallways |
HMDS | resist vapor primer | photolithography |
heidelberg ![]() |
laser pattern transfer system | photolithography |
ksaligner-2 | mask aligner | photolithography |
lam590-trl | Plasma etcher | etch |
SU8spinner | specialty coater | photolithography |
perkin-elmer | sputter system | deposition |
photo-wet | wet station | photolithography |
plasmaquest ![]() |
ECR pecvd-RIE | plasma etch |
PMMA spinner | spin coater | photolithography |
rca ![]() |
wet station | diffusion |
RTA-HiT ![]() |
rapid thermal processing | |
samco ![]() |
inductively coupled plasma reactive ion etcher (ICP RIE) | etch |
Solvent-noAU | wet station | |
sts1![]() |
Si deep trench etcher | etch |
sts2![]() |
etcher | etch |
sts3 | etcher | etch |
-- Kapton Tape | ||
stscvd ![]() |
deposition | |
Target mount | etch | |
tubeA1-CMOSox ![]() |
atmospheric diffusion tube | diffusion |
tubeA2-wetox/bond ![]() |
atmospheric diffusion tube | diffusion |
tubeA3-CMOSinter ![]() |
atmospheric diffusion tube | diffusion |
tubeA4-organic
bake ![]() |
atmospheric diffusion tube | diffusion |
tubeB1-Au ![]() |
atmospheric diffusion tube | diffusion |
tubeB2-ox/alloy ![]() |
atmospheric diffusion tube | diffusion |
tubeB3-dryox/anneal ![]() |
atmospheric diffusion tube | diffusion |
tubeB4-poly | low P diffusion tube | diffusion |
XeF2 ![]() |
isotropic silicon etcher | etch |