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Black |
rca station only, with CMOS-compatible whole Si wafers. No metals, resist, C1 or sts etched Tube A1, lpcvd allowed after RCA |
 |
Brown |
In rca for rca clean or acid-hood for piranha-HF clean, with CMOS-compatible clean Si wafers or pieces. C1 films = ok. No resist or metals A2 allows post STS, B3 allows CMOS fusion bond anneal (both tubes req RCA) |
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Green |
Si general processing. Resist, BOE = ok. No metals Tube A4 allowed for polyimide only |
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Blue |
CMOS-compatible metals = ok, Si general processing, chrome masks. Resist, BOE = ok. No III-V or Au Tube A3 allowed after resist strip, rinse; Tube B2 after metal and resist strip, rinse |
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Yellow |
Post KOH, Post CMP, utility clean. Pyrex ok. No III-V or Au |
Below items allowed in TRL only, items above may go in either ICL or TRL |
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Red |
Au, III-V general processing, including Au post-KOH cleans Tube B1 allowed after RCA in red-dot at acid-hood |
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Purple |
SU-8 only, for “uncured” phase only. After curing and develop, re-classify to pre-SU8 status |
