IMPORTANT NOTE: This content is no longer being actively updated and has been transitioned to the MIT.nano Facility Users site. Please go there for up to date and additional information.
Fab Facilities - Overview
- Integrated Circuits Lab (ICL) - 2nd floor
- Class 10
- Si, 6" wafers
- CMOS-compatible
- MEMS, VLSI
- Technology Research Lab (TRL) - 4th floor
- Class
100
- Si, compound semiconductors, quartz
- Non-standard wafer size (including pieces)
- Au processes allowed, but segregated.
- Exploratory Materials Lab (EML) - 5th floor
- Class 10,000
- Non-standard wafer size (including pieces)
- Many materials (eg, plastics, ceramics)
