MTL Fabrication

SOPS for EML


MACHINE NAME IT DOES: AREA:
ALD PDF Atomic layer deposition vacuum deposition
asher plasma PR stripper  
dektak mechanical surface profilometer  
ebeam-AJA PDF e-beam evaporator deposition
ma-4 mask alignment, UV exposure of photo resist  
OxidationTube PDF CMOS oxidation furnace diffusion
plasmatherm PECVD-RIE plasma etch
RTA-EMLPDF rapid thermal processing  
sputtererAJA thin film deposition  
anneal-furnace PDF tube anneal furnace diffusion