CORAL Name: | Plasmatherm | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
Model Number: | Shuttlelock System VII SLR-770/734 | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
Location: | EML | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
What it does: | Deposits the following films via Plasma-Enhanced Chemical Vapor Deposition (PECVD):
Removes the same films, as well as metals and photoresist, via Reactive Ion Etching (RIE) |
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Safety: |
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Procedure: | Pre-run checklist:
Notes-PECVD: Chamber 1 Before running your devices, you should do a 5 or 10 min dummy run of the film you plan to deposit without any samples present (only the handle wafer) prior to your actual run. This is to condition the chamber. Notes-RIE: Chamber 2
This tool has the capability of cooling the substrate during RIE runs. This is especially important with longer run times when resist can get damaged due to excessive heating. The Helium Cooling Panel is located below the RIE chamber, at knee level. The Helium Cooling capability is manually operated, and not automatic. Labels tell you which switch to turn On during the Process Steps of the recipe (as opposed to the Pumpdown, Purge and Evacuation Steps.) Helium flows at 4 sccm (displayed on the left readout). The pressure should be in the range of 2-5 Torr (displayed on the right readout). Operating Procedure:1 Startup Check active chamber in CRT, which will be highlighted by a white bar. Left Chamber=PECVD, Chamber 1. Right Chamber=RIE, Chamber 2. If a process has been completed, the Ready and OnLine lights will be lit. To change to the other chamber: Press in this order: Screen will display “Chamber 1 or 2 is selected”. It may also display “Recipe is not for selected chamber”. If this is displayed, you will need to load your program. See Section 3 below. The chamber may need to be pumped down. If so, press in this order: Ready Check Loadlock Process indicator. If not at atmosphere press Vent 2 Loading a Recipe From Disk and Reviewing It Once pumped down, insert the disk with your desired recipe into the floppy drive. Press in this order: Standby Choose Load from the options displayed. To review the recipe, press Review. Use the down arrows to step through it. The expected values for the Basic Recipes are shown in the Appendix. After reviewing the last step, press “Ent”. Note: If the disk fails to read, in other words, if the green floppy drive light stays on for more than 60 seconds, see the Troubleshooting Section.
3 Editing a Recipe The steps below pertain to Editing an existing recipe. To create a new recipe, or learn more about how recipes are constructed, see Section 6 Creating a Recipe Press Standby The options displayed are: Build Edit Load Save Review Exit Select Load to load the recipe from the disk. It takes a few seconds to read the disk. The options displayed are: Program Flow Edit Step Insert Step Delete Step Exit Select Program Flow. Use the Up Arrow and Down Arrow to move up and down the recipe to select the step(s) you want to edit. When pointing at the desired step, press the ENT button then select Edit Step You can make changes to:
Once changes are made, select Exit To Insert a Step: Place the cursor below the desired insertion point. You can insert the following types of steps: Process Purge Evacuation Pumpdown Unload Load To save the changes to the floppy disk:
4 To Run a Process To run, press Ready, then Run. Online should already be lit. Be sure to fill in the Process Logbook completely. If the process fails to run automatically, see the Troubleshooting Section. RIE Processes: Remember to turn On the helium cooling circuit at the start of the Process Steps, and Off when the Process Steps end.
5 Completing a Recipe, Securing the Tool: After finishing processing, including test runs and Chamber Cleans, simply unload your samples and latch the Load Lock. Remember to run a Chamber Clean on the PECVD chamber. There is no chamber clean for the RIE chamber. Background A typical recipe sequence for either chamber may be:
* Only the PECVD chamber can control to a temperature, in the range of 150-300C. Climbing to 300C is very slow, on the order of 1 hr. Idle temperature is 200C. The RIE chamber allows for selection of a substrate temperature, but in fact there is no heating capability. When creating an RIE recipe, set the temperature to 200C to avoid having to needlessly wait for the temperature to change in the PECVD chamber, which will have absolutely no bearing on your RIE process. Example This example is an RIE Oxide Etch program, which is similar to etch programs in sequence, but not in chemicals or flow-rates. A small amount (~3 sccm) of CF4 (HC-14, RIE gas #6 ) for SiO2 removal, can be used in addition to O2 (~30 sccm, RIE gas #5), but may not be needed. If you want to process at a pressure lower than 30mT, you may have to add a step to strike a plasma at 30+ mT, w/ a 1min termination time, followed by your actual process step with the lower pressure desired. Press Standby & Program
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Process Gases |
150 sccm SiH4 |
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600 sccm N2O |
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Pressure, mT |
500 |
Temperature, C |
250 |
RF Power, W |
25 |
Nominal Deposition Rate, nm/min |
5 |
Run Time, min |
10 |
Plasma Color |
Purple |
Silicon Nitride Deposition. Typical Refractive Index: 2.01 in March 2012
Process Gases |
3 sccm NH3 |
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100 sccm SiH4 |
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600 sccm N2 |
Pressure, mT |
500 |
Temperature, C |
250 |
RF Power, W |
20 |
Nominal Deposition Rate, nm/min |
8 |
Run Time, min |
10 |
Plasma Color |
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a-Si Deposition
Process Gases |
150 sccm SiH4 |
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Pressure, mT |
500 |
Temperature, C |
150 |
RF Power, W |
25 |
Nominal Deposition Rate, nm/min |
5 |
Run Time, min |
10 |
Plasma Color |
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PECVD Chamber Clean
Process Gases |
100 sccm CF4/O2 (20 min) |
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100 sccm N2 (8 min) |
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Pressure, mT |
50 |
Temperature, C |
200 |
RF Power, W |
100 |
Nominal Deposition Rate, nm/min |
N/A |
Run Time, min |
20+8 |
Plasma Color |
Purple, then red |
Note: As stated in the Pre-Run Checklist section, you must run a Chamber Conditioning Run before Using this tool.
Descum
Process Gases |
35 sccm O2 |
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Pressure, mT |
95 |
Temperature, C |
200* |
RF Power, W |
100 |
Nominal Etch Rate, nm/min |
?? |
Run Time, min |
5 |
Plasma Color |
Purple |
Oxide Etch, Low Power
Process Gases |
3 sccm O2 |
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30 sccm CF4 |
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Pressure, mT |
30 |
Temperature, C |
200* |
RF Power, W |
100 |
Nominal Etch Rate, nm/min |
26 |
Run Time, min |
5 |
Plasma Color |
Light blue |
Oxide Etch, High Power
Process Gases |
3 sccm O2 |
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30 sccm CF4 |
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Pressure, mT |
30 |
Temperature, C |
200* |
RF Power, W |
200 |
Nominal Etch Rate, nm/min |
74 |
Run Time, min |
5 |
Plasma Color |
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* 200C is programmed as the substrate temperature, even though temperature control does not exist for RIE.
See Section 7, Creating a Recipe, Background, for an explanation.
Silicon Etch
Process Gases |
3 sccm O2 |
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30 sccm SF6 |
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Pressure, mT |
40 |
Temperature, C |
200* |
RF Power, W |
200 |
Nominal Etch Rate, um/min |
0.6 |
Run Time, min |
5 |
Plasma Color |
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Metals, Si Etch-1 (also known as Break Through Etch)
Process Gases |
30 sccm BCL3 |
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Pressure, mT |
30 |
Temperature, C |
200* |
RF Power, W |
200 |
Nominal Etch Rate, nm/min |
30 nm/min Si |
Run Time, min |
5 |
Plasma Color |
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Metals, Si Etch-2 (also known as Speed Etch)
Process Gases |
20 sccm CL2 |
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20 sccm BCL3 |
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Pressure, mT |
30 |
Temperature, C |
200* |
RF Power, W |
200 |
Nominal Etch Rate, nm/min |
XX nm/min Si |
Run Time, min |
5 |
Plasma Color |
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* 200C is programmed as the substrate temperature, even though temperature control does not exist for RIE.
See Section 7, Creating a Recipe, Background, for an explanation.
Non-Volatile Etch (for Ni, au, Pt, Pyrex, etc)
Process Gases |
10 sccm CL2 |
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10 sccm BCL3 |
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10 sccm Ar |
Pressure, mT |
30 |
Temperature, C |
200* |
RF Power, W |
300 |
Nominal Etch Rate, nm/min |
XX nm/min Si |
Run Time, min |
5 |
Plasma Color |
Whitish gray |
* 200C is programmed as the substrate temperature, even though temperature control does not exist for RIE.
See Section 7, Creating a Recipe, Background, for an explanation.
Below is a list of common errors seen while Using the Plasmatherm, and suggested solutions to these problems.
Problem |
Solution |
Comment |
Wafer fails to Load or Unload and alarm sounds You will see the Alarm light flash Red and hear a repeating beep. A comment will appear on the screen saying: “Sequencer Error Detected |
Pressing the “Hold” button once or twice will load the wafer and clear the alarm. |
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RF Reflected Power High |
Pressing Hold will restart the RF Power Supply. Note:
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Usually seen when 300 Watts of RF power or more is selected. |
System is frozen |
Reset system by pressing the RESET button. This is behind a door at about waist-level on the system controller (the tower hoUsing the CRT) |
You may need to restart the turbopump after resetting the tool. To do this: Press in this order: -On (you’ll hear a loud pneumatic release)
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Troubleshooting, cont’d
Problem |
Solution |
Comment |
Recipe fails to Load from disk. Disk drive appears to “freeze” with green light on. |
Do the following:
On (you’ll hear a loud pneumatic release) |
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Particles on the wafer after PECVD dep |
Notify a staff member. This requires venting and manually cleaning the deposition chamber. Following the manual clean, do a:
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