category » MEMS & BioMEMS
Catastrophic structural failures cause many physical and personal losses, with prevention estimated at billions of dollars in savings each year….
Carbon nanotube (CNT) composites are promising new materials for structural applications thanks to their mechanical and multifunctional properties. We have…
This work presents the first hybrid RF MEMS-CMOS resonators demonstrated in silicon at the transistor level of IBM’s 32-nm SOI…
An electrospray emitter ionizes polar liquids using high electrostatic fields. The electric field produces suction on the free surface (meniscus)…
A major challenge in immunobiology is to better understand how the immune cells dynamically interact with each other and with…
Interfaces with the nervous system are important for understanding basic neurobiology and for neuromedicine. We are part of a multi-university…
The use of microsystems to manipulate and study cells in microenvironments is continually increasing. However, along with such increase in…
The development of new techniques to separate and characterize cells with high throughput has been essential to many advances in…
Stem cell phenotype and function are influenced by microenvironmental cues that include cell-cell, cell-extracellular matrix (ECM), and cell-media interactions (i.e.,…
Microfluidic approaches to cell sorting include purely dielectrophoretic (DEP) trap arrays [1] , passive hydrodynamic trap arrays with active DEP-based…
We integrated ultra-porous (99% porous) elements (nanoporous forests of vertically aligned carbon nanotubes (VACNTs)) in MEMS, showing their use in…
Characterization of thin film layered materials is critical for many MEMS devices. Residual stresses from production determine both final shape…
Vertically-aligned carbon nanotube (CNT) arrays are grown on a moving substrate, demonstrating continuous growth of nanoscale materials with long-range order….
Arrays of MEMS Langmuir probes that are flush-mountable (Figure 1) can serve as a sensorial skin on a spacecraft for…
Development of miniature vacuum pumps that can be integrated with electronic or MEMS components is necessary for producing advanced equipment…
The need to measure particle energies arises in many applications, from calibrating electron sources for electron guns in precision microscopes…
This work focuses on the design and fabrication of a cathode for a portable x-ray source. The cathode is made…
Electrospray is a process to ionize electrically conductive liquids that relies on strong electric fields; charged particles are emitted from…
Electrospinning is a process in which a membrane-like web of thin fibers can be produced using high electrostatic fields and…
Controlling the intrinsic stress in polycrystalline thin films is of great importance in a wide variety of applications, especially those…
Silicon CMOS circuits have a well-defined lower limit on their achievable energy efficiency due to sub-threshold leakage. Once this limit…
We have used a microfluidic mass sensor to measure the density of single living cells. By weighing each cell in…
Although new software techniques enable higher-resolution medical ultrasound imaging, commercial ultrasonic transducer technology has remained largely unchanged for a few…
Polymer materials doped with conductive particles exhibit piezoresistive properties. These materials are fabricated such that their conductivity changes with an…
Nano-electromechanical systems (NEMS) are an emerging area of research with potential applications as low-power switches for electronic circuits. The proliferation…
A pressure sensor array is under development for unmanned undersea vehicles (UUV). This project is inspired by the lateral line…
The average diameter of human red blood cells (RBCs) is around 8µm. As RBCs circulate in the body and transport…
In the stomach, the biological hydrogel known as mucus protects the stomach wall from the damaging effects of strongly acidic…
Although inertial force-induced lateral migration has been extensively studied for almost 50 years and has been utilized in various microchannels…
Sepsis is an adverse systemic inflammatory response caused by microbial infection in blood. In this work, we report a simple…
Professor Ed Boyden uses light to precisely control neural activity. His lab has invented safe, effective ways to deliver light-gated…
Design and optimization of novel RF Nano-Electro-Mechanical (NEM) resonators such as Resonant Body Transistors (RBT) require modeling across multiple domains,…
Nanostructured solar cells are attracting increasing attention as a promising photovoltaic (PV) technology [1] . Generation of free charge carriers…
It is desirable to extend the functionality of MEMS to different form factors including large-area arrays of sensors and actuators,…
Electromechanical resonators such as quartz crystals, surface acoustic wave (SAW) resonators, and ceramic resonators have become essential components in electronic…