MEMS Pressure-Sensor Arrays for Passive Underwater Navigation

A pressure sensor array is under development for unmanned undersea vehicles (UUV). This project is inspired by the lateral line sensory organ in fish, which enables some species to form three-dimensional maps of their surroundings [1] [2] . The canal subsystem of the organ can be described as an array of pressure-sensors [3] . The lateral line allows fish to perform a variety of actions, from tracking prey [4] to recognizing nearby objects [2] [5] .  Similarly, by measuring pressure variations on the surface of an UUV, an engineered pressure-sensor array supports the identification and location of obstacles for navigation.

To be compatible with the doubly-curved surface of a typical UUV hull, the pressure sensor array must be flexible.  Further, it is desirable that the array be amenable to wide-area fabrication. Correspondingly, the design pursued here is fabricated primarily from a PDMS polymer, some parts of which are doped with conducting nanoparticles so as to become piezoresistive.  As shown in Figure 1 below, a pressure sensor array consists of piezoresistive strain-gauges patterned onto PDMS membranes suspended over cavities formed in a PDMS substrate [6] .  The resistance of each strain gauge is measured using a four-point probe array with a common current source shared by all sensors. The strain-gauge resistance can be related to the deflection of its corresponding membrane, and hence the pressure difference across the membrane.  All cavities are connected together so that all pressure sensors have a common reference.

During the past year, flexible pressure sensor arrays were mounted on the side of a kayak for open-water tests, as shown in Figure 2a below. The pressure measurement from one sensor is shown in Figure 2b together with measurements from nearby commercial reference sensors.  The similarity of the measurements demonstrates the functionality of the PDMS pressure sensors in an uncontrolled environment.

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