| SOP NAME | LAB AREA |
RB-24  |
This SOP applies only to 24-hour users who have been qualified for a Buddy Card (to be referred to as RB-24). |
| chrome masks | |
| 6" hockey pucks | |
| Photoresist recipes (TRL) | |
| PDMS | |
| VDRTAs-Summary |
This is a summary chart of RTA machines available in MTL. |
| Wafer alignment SOP |
photolithography |
| LSA marks SOP |
photolithography |
| Wx | Wy | LSAx | LSAy |
gdsII format for ICL i-stepper alignment marks that are required for multi-level stepper jobs |