SOP NAME | LAB AREA |
RB-24 | This SOP applies only to 24-hour users who have been qualified for a Buddy Card (to be referred to as RB-24). |
chrome masks | |
6" hockey pucks | |
Photoresist recipes (TRL) | |
PDMS | |
VDRTAs-Summary | This is a summary chart of RTA machines available in MTL. |
Wafer alignment SOP | photolithography |
LSA marks SOP | photolithography |
Wx | Wy | LSAx | LSAy |
gdsII format for ICL i-stepper alignment marks that are required for multi-level stepper jobs |