MTL Fabrication

Other Standard Operating Procedures


SOP NAME LAB AREA
RB-24 PDF This SOP applies only to 24-hour users who have been qualified for a Buddy Card (to be referred to as RB-24).
chrome masks  
6" hockey pucks  
Photoresist recipes (TRL)  
PDMS  
VDRTAs-Summary PDF This is a summary chart of RTA machines available in MTL.
Wafer alignment SOP PDF photolithography
LSA marks SOP PDF photolithography
Wx | Wy | LSAx | LSAy
gdsII format for ICL i-stepper alignment marks that are required for multi-level stepper jobs