In order to improve the sensitivity of superconducting nanowire single-photon-detectors (SNSPDs ) at telecom wavelengths and extend it to the…
The study of colloidal nanocrystals (NCs) that are optically active in the near-infrared is of great importance, from both a…
A new method for developing hydrogen silsesquioxane (HSQ), a negative electron-beam resist with demonstrated 9-nm-pitch resolution, is presented, avoiding the…
Self-organized macromolecular materials can provide an alternative pathway to conventional lithography for the fabrication of devices on the nanometer scale….
Poly(methyl methacrylate) (PMMA) is an important resist for electron-beam lithography. For low doses, it is a positive resist; for high…
Patterned templates can guide the self-assembly of nanoparticles into ordered arrays. Our motivation in pursuing templated self-assembly is to develop…
In this work, we demonstrated the patterning of Au features on <111> B GaAs substrates by galvanic displacement and metal…
Periodic nanostructures have proven their usefulness in the fabrication of diffraction gratings, photonic crystals, magnetic domains in recording media, nanochannels…
Templated block copolymer (BCP) self-assembly is attractive for fabricating few-nanometer-scale structures at high throughput ((I. Bita, J.K. Yang, Y.S. Jung,…
We designed and fabricated superconducting nanowire single-photon detectors (SNSPDs) with nano-optical antennae to reduce the length of the nanowire needed…
Scanning helium-ion-beam lithography (HIBL) can fabricate patterns with sub-10-nm half-pitch. The interaction volume of a beam with a sample is…
Scanning-electron-beam lithography (SEBL) commonly uses voltages between 10-100 keV. Higher voltages result in distributed proximity effects, lower sensitivity, and a higher…
Over the last decade, quantum information experiments with trapped ions have demonstrated essential steps towards quantum computing and quantum simulation. …
Superconductive nanodevice physics and applications; nanofabrication methods, processes, and tool-development for application to quantum computing and single-photon detection.