Materials
- Integrated Materials Growth System
- Experimental Characterization
of Electromigration-Induced Failure of Cu-Based IC Interconnects
- Development of Processes and Technologies
for Interconnects for 3D Integrated Circuits
- Epitaxial Growth of GaN on Silicon
- Stress Evolution During Reactive
Film Formation
- Inelastic Deformation Polycrystalline
Thin Films and Lines
- Stress Evolution During Volmer-Weber
Growth of Thin Film s
- Magnetic Anisotropy and Microstructure
in Cr/CoCrPt Hard Disk Films
- Ge Photodetectors for Si Microphotonic
Circuits
- Magnetic and Optical Films Made
by Pulsed Laser Deposition
- Cluster Ion Beam Processing
- Molecular Beam Epitaxy of InP-based
Heterostructures on Silicon Substrates and Membranes
- Strained Ge p-type and n-type
MOSFETs Fabricated on Si1-xGex Virtual Substrates
- High Mobility Strained Si/SiGe
Heterostructure MOSFETs
- Surface Micro-Patterning and Bio-Passivation
Using Reactive CVD Coatings
- Microencapsulation of Quantum Dots
and Organization into Spatial Patterns