Ultra-wide-bandwidth Micro Energy-harvester

A novel ultra-wide-band resonating thin-film PZT MEMS energy-harvester has been developed. It harvests energy from parasitic ambient vibration at a wide range of amplitude and frequency via the piezoelectric effect. Up to this point, the designs of most piezoelectric energy devices have been based on high-Q linear cantilever beams that use the bending strain to generate electrical charge via the piezoelectric effect [1] [2]. They suffer from very small bandwidth and low power density, which prohibit practical use. Contrary to the traditional designs, our new design utilizes the tensile stretching strain in doubly-anchored beams [3]. The resultant stiffness nonlinearity due to the stretching provides a passive feedback and consequently an ultra-wideband resonance [4]. This wide bandwidth of resonance enables a robust power generation amid the uncertainty of the input vibration spectrum. This work includes the design, microfabrication, and testing of a MEMS-scale prototype that aims to harvest up to 0.1mW electrical power in a wide range of excitation frequencies. Mechanical testing has shown 10-fold improvements in the displacement bandwidth. Our simulation predicts 100-fold improvement in the electrical power bandwidth compared to the conventional linear designs. Currently, a new generation of the device is under fabrication and testing at MTL and MNSL facilities.


References
  1. Y.R. Jeon, Sood, J.H. Jeong, and S.G. Kim, “MEMS power generator with transverse mode thin film PZT,” Sensors and Actuators A: Physical, vol. 122, pp. 16-22, 2005. []
  2. W.J. Choi, Y. Xia, J.A. Brewer, and S.G. Kim, “Energy harvesting MEMS device based on thin-film piezoelectric cantilevers,” in Proc. of INSS05, San Diego, CA, June 27-28, 2005. []
  3. A. Hajati and S.G. Kim, “Rectifierless Piezoelectric Micro Power Generator,” SPIE Smart Structures and Materials & Nondestructive Evaluation and Health Monitoring 2008, San Diego, CA, 2008. []
  4. A. Hajati and S.G. Kim, “Wide Bandwidth MEMS-scale Piezoelectric Energy Harvester,” PowerMEMS09, Washington, DC, 2009. []

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