MTL Annual Report

tag » hayden taylor

• Fast Simulation of Pattern-dependencies in Thermal Nanoimprint Lithography

  • A key challenge for putative industrial users of thermal nanoimprint lithography (NIL) is to design mask patterns that can be…

• A Computationally Simple, Wafer-to-feature-scale Model of Etch-rate Variation in Deep Reactive Ion Etching

  • Modeling etch-rate variation in Deep Reactive Ion Etching (DRIE) helps to identify possible defects in MEMS and IC devices arising…