Modeling and Simulation
- Integrated Chip-Scale Simulation of Pattern Dependencies in Copper Electroplating and Chemical Mechanical Polishing Processes
- Modeling of CMP and Nanotopography Interactions
- Cu Gettering Studies in Silicon
- Multiscale Simulations of Thin Film Deposition Processes
- Modeling of Advanced Devices
- Experimental Investigation of Carrier Velocity and Mobility in Deeply Scaled MOSFETs