MTL Annual Research Report 2011

Collaborators

• A.I. Akinwande, EECS, MIT
• V. Hruby, Busek Co.
• C. Livermore, MechE, MIT
• P. Marek, US Army NSRDEC
• M.A. Schmidt, EECS, MIT
• K. Senecal, US Army NSRDEC
• S. Taylor, University of Liverpool

Postdoctoral Associates

• K. Cheung (co-supervised with A.I. Akinwande)
• X. Wang (co-supervised with A.I. Akinwande)

Graduate Students

• E. Field, Research Assistant, MechE
• E. V. Heubel, Research Assistant, MechE (co-supervised with A.I. Akinwande)
• S. Guerrera, Research Assistant, EECS (co-supervised with A.I. Akinwande)
• V. Jayanti, Research Assistant, EECS
• D. Jeng,  Research Assistant, EECS (co-supervised with A.I. Akinwande)

Undergraduate Students

• M. R. Overlin

Support Staff

• C. Collins, Admin. Asst. II

Publications

F. Eid, L. F. Velásquez-García, and C. Livermore, “Design, Fabrication, and Demonstration of a MEMS Steam Generator for Ejector Pump Applications”, Journal of Micromechanics and Microengineering, Vol. 20, No. 20, 104007, 2010.

K. Cheng, L. F. Velásquez-García, and A. I. Akinwande, “Chip-Scale Quadrupole Mass Filters for Portable Mass Spectrometry”, Journal of Microelectromechanical Systems, Vol. 19 No. 3, pp. 469–483, 2010.

L. F. Velásquez-García, B. Gassend, and A. I. Akinwande, “CNT-based MEMS Ionizers for Portable Mass Spectrometry Applications”, Journal of Microelectromechanical Systems, Vol. 19, No. 3, pp. 484–493, 2010.

B. Gassend, L. F. Velásquez-García, and A. I. Akinwande, “Design and Fabrication of DRIE-Patterned Complex Needle-Like Structures”, Journal of Microelectromechanical Systems, Vol. 19, No. 3, pp. 589–598, 2010.

T. J. Hogan, S. Taylor, K. Cheung, L. F. Velásquez-García, A. I. Akinwande, and R. E. Pedder, ”Performance Characteristics of a MEMS Quadrupole Mass Filter with Square Electrodes – Experimental and Simulated Results”, IEEE Transactions on Instrumentation and Measurement, Vol. 59, No. 9, pp. 2458 – 2464, 2010.

K. Cheung, L. F. Velásquez-García, and A. I. Akinwande, “High-Performance Square Electrode Quadrupole Mass Filters”, Technical Digest 23^rd IEEE International Conference on Micro Electro Mechanical Systems MEMS 2010, Hong Kong, SAR, China, pp. 867 – 870, Jan. 24 – 28 2010.

F. Eid, L. F. Velásquez-García, and C. Livermore, “Design, Fabrication, and Demonstration of a MEMS Steam Generator for Ejector Pump Applications”, Technical Digest 9^th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Washington DC, USA, pp. 41 – 44, December 1-4, 2009. (Article won best student oral presentation award).

L. F. Velásquez-García, B. Gassend, and A. I. Akinwande, “CNT-Based Gas Ionizers with Integrated MEMS Gate for Portable Mass Spectrometry Applications”, Technical Digest of 15^th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver CO, USA, pp. 1646-1649, June 21 – 25, 2009.

B. Gassend, L. F. Velásquez-García, A. I. Akinwande and M. Martinez-Sanchez,“ A Microfabricated Planar Electrospray Array Ionic Liquid Ion Source with Integrated Extractor”, Journal of Microelectromechanical Systems, Vol. 18, No. 3, pp. 679 – 694, 2009.

B. Gassend, L. F. Velásquez-García, and A. I. Akinwande, “Precision In-Plane Hand Assembly of Bulk-Microfabricated Components for High Voltage MEMS Arrays Applications”, Journal of Microelectromechanical Systems, Vol. 18, No. 2, pp. 332 – 326, 2009.

L. F. Velásquez-García, K. Cheung, and A. I. Akinwande, “An Application of 3D MEMS Packaging: Out-Of-Plane Quadrupole Mass Filters”, Journal of Microelectromechanical Systems, Vol. 16, No. 6, pp. 1430–1438, 2008.

L. F. Velásquez-García and A. I. Akinwande, “Fabrication of Large Arrays of High-Aspect-Ratio, Single Crystal Silicon Columns with Isolated vertically Aligned Multi-Walled Carbon Nanotube Tips”, Nanotechnology 19, (2008) 405305. (Article was the cover page and featured article of the issue 40 of the IOP Journal Nanotechnology).