MTL Annual Research Report 2011

Collaborators

• A. Chandrakasan, MIT
• T. Palacios, MIT
• D. Boning, MIT
• G. Fedder, CMU
• T. Kazior, Raytheon
• G. Bourianoff, Intel

Graduate Students

• R. Marathe, Research Assistant, EECS
• W. Wang, Research Assistant, ME
• L. Popa, Research Assistant, Physics

Support Staff

• V. Dinardo, Admin. Asst.

Publications

W. Wang, D. Weinstein, “Acoustic Bragg reflectors for Q-enhancement of unreleased MEMS resonators,” IEEE Frequency Control Symposium (FCS 2011), San Francisco, CA, May 1-5, 2011.

W. Wang, L.C. Popa, R. Marathe, D. Weinstein, “An unreleased mm-wave resonant body transistor,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011), 1341-44.

D. Weinstein, S.A. Bhave, “Acoustic resonance in an Independent-Gate FinFET,” Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2010), Hilton Head Island, South Carolina, June 6-10, 2010.

D. Weinstein, S.A. Bhave, “The resonant body transistor,” Nano Letters 10(4) 1234-37 (2010).

D. Weinstein, S.A. Bhave, “Internal dielectric transduction in bulk-mode resonators,” IEEE Journal of Microelectromechanical Systems (JMEMS), 18(6), 1401-1408 (2009).

L. Sekaric, O. Gunawan, A. Majumdar, X.H. Liu, D. Weinstein, J.W. Sleight, “Size-dependent modulation of carrier mobility in top-down fabricated silicon nanowires,” Applied Physics Letters, 95(2), 023113 (2009).

D. Weinstein, S.A. Bhave, “Frequency scaling and transducer efficiency in internal dielectrically transduced silicon bar resonators,” International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2009), pp. 708-711.

D. Weinstein, S.A. Bhave, “Piezoresistive sensing of a dielectrically actuated silicon bar resonator,” Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2008), pp. 368-371 (2008).

D. Weinstein, S.A. Bhave, “Internal dielectric transduction of a 4.5 GHz silicon bar resonator,” IEEE International Electron Devices Meeting (IEDM 2007), pp. 415-418.

D. Weinstein, S.A. Bhave, “Internal dielectric transduction: optimal position and frequency scaling,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 54(12), 2696-98 (2007).

D. Weinstein, S.A. Bhave, M. Tada, S. Mitarai, S. Morita, K. Ikeda, “Mechanical coupling of 2D resonator arrays for MEMS filter applications,” IEEE Frequency Control Symposium (FCS 2007), pp. 1362-1365.