Microsystems Technology Laboratories

MARC2006
January 25-26, 2006
Waterville Valley Conference and Event Center

Session Titles

Please note that this list is subject to change.

Session 1: Circuits & Systems
Matt Park, Session Chair

Wireless/Wireline
1.01 77 GHz Receiver for MM-Wave Imaging
J.D. Powell, K.M. Nguyen, H. Kim, C.G. Sodini
1.02 A Chipset for a Micro-Power Wireless Sensor Node
D. Finchelstein, D. Daly, N. Ickes, N. Verma, A. Chandrakasan
1.03 Ultra-Wideband Transceiver Circuits and Systems
B.P. Ginsburg, N. Ackerman, M. Bhardwaj, R. Blazquez, C.R. Deonier, F.S. Lee,  V. Sze, D.D. Wentzloff, A.P. Chandrakasan
1.04 Wireless Giga-Bit Local Area Network
F. Edalat, L. Khuon, K. Nguyen, J.K. Tan , C.G Sodini
1.05 Chopper Stabilization in Analog Multipliers
A. Hadiashar, J.L. Dawson
Mixed-Signal
1.06 Comparator Based Switched Capacitor Circuits for Scaled CMOS Technologies
J.K. Fiorenza, T. Sepke, C.G. Sodini P. Holloway, H.-S. Lee
1.07 IMPACT: Massively Parallel Analog-digital Converter Test Chip
M. Spaeth, H.-S. Lee
1.08 Indirect Background Calibration of Pipelined ADCs via Decision Boundary Gap Estimation (DBGE)
L.G. Brooks, H.S. Lee, G.W. Wornell
Emerging Technology
1.10 Minimum Energy Digital Circuits Using Sub-Threshold Operation
J.Y.S. Kwong, Y. Ramadass, B. Ginsburg, V. Sze, B. Calhoun, A. Chandrakasan
1.11 Optical Feedback Organic LED Display: Design of Silicon Feedback Circuits and Integration of Organic Components
K. Ryu, A. Lin, K. Lamba, I. Nausieda, J. Kymissis, V. Bulovic, C.G. Sodini
1.12 Performance and Limitations of 65 nm CMOS for Integrated RF Power Applications
J. Scholvin, D.R. Greenberg, J.A. del Alamo
CAD/Modeling
1.13 Parameterized Model Order Reduction for Nonlinear Dynamical Systems
B.N. Bond, L. Daniel
1.14 Test Structures and Optimization Methodologies for Electrical Variation in IC
K. Balakrishnan, D. Lim, N. Drego, K. Gettings, D.S. Boning

Session 2: Photonics
Vikas Sharma, Session Chair

Opto-Electronic Integration
2.01 AlGaAs/GaAs VCSEL Processing and Heterogeneous Integration with Si ICs
J.M. Perkins, J. Rumpler, II, E. Barkley, C.G. Fonstad
2.02 SiOxNy Waveguides on Si and Optical Coupling to Co-Axial RM3 Integrated Devices
E. Barkley, C.G. Fonstad, J. Rumpler, J. Perkins, S. Famini
2.03 Highly Integratable In-plane Laser Diodes for Optoelectronic Integration
J.J. Rumpler, II, C.G. Fonstad, Jr.
2.04 Integration of Waveguide and Photodetector for Silicon Based Microphotonics Chip
D. Ahn, C.-Y. Hong, J. Michel, L.C. Kimerling
2.05 Precision Nanofabrication of Integrated Photonic Devices
C.W. Holzwarth, R. Barreto, T. Barwicz, H.I. Smith
Photodetectors
2.07 CMOS-compatible Photodetectors Using Ge-on-Si films Deposited in an Applied Materials Epitaxial Reactor
O.O. Olubuyide, M. Kim, D.T. Danielson, J. Liu, J. Yasaitis, L.C. Kimerling, J.L. Hoyt
2.08 High-Performance, Tensile-Strained Ge P-I-N Photodetectors on a Si Platform
J. Liu, J. Michel, W. Giziewicz, D. Pan, K. Wada, D.D. Cannon, S. Jongthammanurak, D.T. Danielson, L.C. Kimberling
Photonic Crystals & Applications
2.10 Localized Propagation Modes Guided by Shear Discontinuities in Photonic Crystals
K. Tian, G. Barbastathis
2.11 New Solar Cells with Novel Textured Photonic Crystal Backreflector for Light Trapping
L. Zeng, Y. Yi, C. Hong, B.A. Alamariu, J. Liu, X. Duan, L.C. Kimerling
MOEMS
2.12 MEMS Switching and Tuning of Integrated Optical Ring Resonators
S. Takahashi, D. Seneviratne, G. Barbastathis
Holography
2.13 Volume Holographic Imaging with Natural and Supercontinuum Illumination
W. Sun, S. Oh, K. Tian, Z. Xu, G. Barbastathis

Session 3: MEMS
Ole Nielsen, Session Chair

Printing
3.01 A Second Generation Micromachined Printhead for the Direct Evaporative Patterning of Organic Materials
V. Leblanc, J. Chen, V. Buloviç, M.A. Schmidt
Microchemical Systems
3.02 A MEMS Singlet Oxygen Generator
T. Hill, B. Wilihite, L. Velasquez-Garcia, A. Epstein, K. Jensen, C. Livermore
3.03 A Linear Quadrupole for Mass Spectroscopy with a Meso-Scaled Deflection Spring Assembly System
L.F. Velasquez-Garcia, A.I. Akinwande
Power MEMS
3.04 An Integrated Multiwatt Permanent Magnet Turbine Generator
B.C. Yen, M. Allen, F.F. Ehrich, A.H. Epstein, F. Herrault, L.C. Ho, S. Jacobson, J.H. Lang, H. Li, Z.S. Spakovszky, C.J. Teo, D. Veazie
3.05 A Low Contact Resistance MEMS Relay
A.C. Weber, J.H. Lang, A.H. Slocum
3.06 A Fully Micro-Fabricated Planar Array of Electrospray Emitters for Space Propulsion Applications
B. Gassend, L.F. Velasquez-Garcia, A.I. Akinwande, M. Martinez-Sanchez
3.07 Micro Reaction Technology for Thermally Efficient Energy Conversion
B. Blackwell, K. Deshpande, O. Nielsen, M.A. Schmidt, K. Jensen
Fabrication
3.08 Characterization, Modeling and Design Optimization of Plasma Etch Variations
K.O. Abrokwah, H.K. Taylor, A. Farahanchi, S.P. Vudathu, D.S. Boning
3.09 Dynamic Modeling of CMP and Electroplating Processes
H. Cai, D. Truque, X. Xie, D. Boning

Session 4: BioMEMS
Katarzyna Puchala, Session Chair

Cell Manipulation
4.01 Micromechanical Control of Cell-Cell Interaction
E.E. Hui, S.N. Bhatia
4.02 A Conductivity-Specific, Continuous Micro-Organism Separator
M.D. Vahey, J. Voldman
4.03 Microfluidic/Dielectrophoretic Approaches to Selective Microorganism Concentration
K. Puchala, H.-Y. Lee, J. Voldman
4.04 A Multilayered Microfluidic Device for Combinatorial Tissue Biology in Vitro
D.T. Eddington, S.N. Bhatia
4.05 A Microfabricated Platform for Investigating Multicellular Organization in 3-D Microenvironmentsnments
D.R. Albrecht, R.L. Sah, S.N. Bhatia
Biomolecule Manipulation
4.06 High Speed Continuous Fractionation of Proteins in a Nanofilter Array Chip
J. Fu, J. Han
4.07 Generation of Supported Lipid Bilayer and Vesicle Arrays for Study of Sphingomyelinase-Lipid Membrane Interaction
L. Chao, A.P. Gast
4.08 Continuous-Flow pI-Based Sorting of Proteins and Peptides in a Microfluidic Chip using Diffusion Potential
Y.A. Song, J. Han

Session 5: Molecular & Nanotechnology
Anita Villanueva, Session Chair

Carbon Nanotubes
5.01 Carbon Nanotube Assembly for Interconnect and Device Applications
T.M. Wu, B. Long, R. Reif, F. Stellacci
5.02 CVD Synthesis of Aligned Carbon Nanotubes for Interconnect Applications
A. Reina Cecco, M. Hofmann, H. Son, J. Kong
5.03 Rapid and Shape-Controlled Growth of Aligned Carbon Nanotube Structures
A.J. Hart, L.C. van Laake, O. Yaglioglu, A.H. Slocum
5.04 Single-Gated CNT Arrays for Electron Impact Ionization and Field Ionization
L.F. Velasquez, A.I. Akinwande
Nanofabrication
5.05 Analysis, Design, and Optimization of Nanostructured Origami
P. Stellman, N. Shaar, T. Nichol, G. Barbastathis
5.06 Materials and Processes for Nanostructured Origami
W.J. Arora, H.J. In, T. Nichol, G. Barbastathis
5.07 AC Field Directed Assembly of Gold Nanoparticles into Nano-Gaps
R. Barsotti, R. Wartena, F. Stellacci, Y. Chiang
5.08 Achieving Nanometer Overlay in Imprint Lithography
E.E. Moon, H.I. Smith
NEMS
5.09 Vertical Nano-Relays
K.M. Milaninia, M.A. Baldo

Session 6: Electronic Devices & Emerging Technologies
Osama Nayfeh, Session Chair

Beyond CMOS
6.01 Potential of InGaAs HEMTs as a Beyond-CMOS Logic Technology
D.-H. Kim, J.A. del Alamo
6.02 Electrical Characteristics of Germanium MOSFETs with High-K Dielectrics
A. Ritenour, R.Z. Lei, A. Khakifirooz, K. Kim, R. Gordon, D.A. Antoniadis
6.03 Effect of Biaxial and Uniaxial Strain on the Mobility in Ultrathin SOI and GOI
A. Khakifirooz, I. Lauer, D. A. Antoniadis
6.04 Interdiffusion in SiGe/Si Epitaxial Heterostructures
G. Xia, J.L. Hoyt
6.05 Mobility Modeling and Electrostatics of Heterostructure-on-Insulator FETs
O.M. Nayfeh, C. Ní Chléirigh, I. Åberg, J.L. Hoyt, D.A. Antoniadis
Organic Electronics
6.06 Threshold Voltage in Pentacene O-TFTs
A.I. Wang, J. Kymissis, V. Bulovic, A.I. Akinwande
6.07 Oxidatively initiated Chemical Vapor Deposition of PEDOT
S.G. Im, K.K. Gleason
Interconnects
6.08 Through-Substrate Interconnects for Millimeter-Wave Mixed-Signal
Systems
J.H. Wu, J.A. del Alamo
Fuel Cells
6.09 Microfabricated Fuel Cell Electrodes for Studying Oxygen Reduction
Y. Shao-Horn, G.J. la O'
Opto-Electronic Communication
6.10 Photonic Crystals for IR and NIR Applications
N. Jovanovic, I. Celanovic, D. Perreault, T. Keim, J. Kassakian
Next Generation Displays
6.11 Double-Gated Carbon Nano Fibers Field Emission and Field Ionization Arrays
L.-Y. Chen, B.Adeoti, L.F. Velasquez-Garcia, A.I. Akinwande
Microfabrication
6.12 Germanium-on-Insulator Fabrication by Wafer Bonding and Layer Transfer
J. Hennessy, D.A. Antoniadis
6.13 Raised Source/Drain Technology for Ultra-thin Fully Depleted SOI
  L. Gomez, C. Chen, J.A. Burns, J.L. Hoyt
6.13a Microelectronic Thin Films Handling and Transfer Using Low Temperature Wafer Bonding
A. Fan, A. Somani, C.S. Tan, R. Reif
6.14 Processing Ge in the MTL Fabs
B. Alamariu, B. McKenna
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