The Laboratories Subway

Note: This page is no longer maintained. Clickable map last updated September 3, 2007; here's What's New.

The Facilities Subway provides links to foundries and fabrication facilities.

Manufacturing Research Facilities

The Centre for Electronic Materials (CEM) provides information about its research and postgraduate teaching related to electronic materials.

The Microcontamination Research Laboratory at Clarkson University conducts research into particle generation, deposition, and transport in semiconductor process equipment.

The Research Triangle Center for Semiconductor Research has a primary focus on GaAs- and InP-based heterojunction bipolar transistor (HBT) devices and circuits for a variety of electronic and optoelectronic applications.

The NIST Electronics and Electrical Engineering Laboratory promotes U.S. economic growth by providing measurement capability of high impact focused primarily on the critical needs of the U.S. electronics and electrical industries, and their customers and suppliers.

Micro/Nanofabrication Research Facilities

A Nanofabrication Facilities Compendium has been compiled by Victor Jones at Harvard.

An interactive database of University Fabrication Facilities and capabilities can help you identify places to explore the power of microfabrication.

The MIT Microsystems Technology Laboratories has a broad program of educational, research, and service activities.

The Stanford Center for Integrated Systems has information on research, facilities, and services at Stanford.

The University of California at Berkeley has made available information on the Berkeley Microlab.

The National Nanofabrication User Network (NNUN) provides individuals with the opportunity to experiment with advanced nanofabrication technology.

The Cornell Nanofabrication Facility is a key member in the NNUN.

The Wisconsin Center for X-Ray Lithography provides information on their facility and software.

The University of Illinois has an Integrated Circuit Fabrication course in their Electrical and Computer Engineering Department which utilizes WWW screens.

The University of Texas at Austin MRC is an interdisciplinary Microelectronics Research Center which provides information about its research groups and interests.

The Northeastern University Electron Devices Group has an expanding network of laboratories serving faculty and graduate students. Laboratory capabilities currently include microfabrication, microwave materials fabrication and characterization, plasma measurements and processing, noise measurements, microwave device characterization, and VLSI design.

The Center for Compound Semiconductor Microelectronics (CCSM) is an NSF Engineering Research Center located at the University of Illinois. Information about their research in optoelectronics is available.

The Nanoelectronics Laboratory at the University of Cincinnati provides information about its research at the nanometer scale in semiconductors and other electronic materials.

The Rochester Institute of Technology provides information about its Microelectronics research.

The ASU NanoFab is managed by the Center for Solid State Electronics Research and provides processing and characterization capabilities to support interdisciplinary research and development in Bio and Molecular Electronics, Nanostructures, Low Power Electronics, Molecular Beam Epitaxy and Optoelectronics, Materials and Process Fundamentals, MEMS, Nanofluidics, Wide Band Gap Semiconductors, High-K Dilectrics and Nanomagnetics.

The University of Michigan Solid State Electronics Laboratory provides information about the work of its III-V Integrated Devices and Circuits Group.

The Auburn University Alabama Microelectronics Science and Technology Center (AMSTC) provides information about its interdisciplinary efforts to advance microelectronics education and technology.

The UC Davis Microfabrication Facility researches microelectronics, MEMs, and optoelectronics and explores new applications of these technologies.

The University of Toronto Electronic Materials Group has processing, characterization, and computation facilities, and conducts a range of research projects in electronic materials.

The Laboratory for the Integration of Sensors and Actuators (LISA) at the University of Montreal does research on MEMS, high speed devices on III-V heterostructures, opto-electronics, selective ionic membranes bases on Nasicon, and integrated gas sensors.

The Washington Technology Center is a state science and technology organization that funds and fosters industry-university collaborations. WTC connects entrepreneurs and scientists who often need each other to bring commercially promising ideas to fruition. Its cleanroom, located on the University of Washington Campus in Seattle, is open to industry and academic users for MEMS micromachining processing. The Penn State Electronic Materials and Processing Research Laboratory (EMPRL) offers substantial WWW information on its existing and new facilities, personnel, and programs.

The Minnesota Microtechnology Laboratory (MTL), is an interdisciplinary facility that supports faculty research within the Institute of Technology to enhance its threefold mission of education, research and industrial collaboration.

The North Carolina Center for Advanced Electronic Materials Processing is developing technologies for in situ , single-wafer processing (cleaning, deposition, etching). The program deals with automation and control of the individual processes and their integration into single-wafer processing module clusters.

The mission of the Princeton NanoStructures Laboratory (NSL) is to explore and develop new nanotechnologies that will fabricate structures substantially smaller, better, and cheaper than current technology permits, and innovative nanoscale electronic, optoelectronic, and magnetic devices by combining cutting-edge nanotechnology with frontier knowledge from different disciplines.

The Princeton University Center for Photonics and OptoElectronic Materials (POEM) Micro/Nano Fabrication Laboratory is used for the microfabrication of semiconductor and MEMS devices. Substrate sizes range up to six-inch diameter, and lithographic capabilities range from micron-scale features by contact lithography down to 100 nanometer (nm) features by electron beam lithography.

Carleton University's Microelectronics Fabrication Laboratory (MFL) is a flexible facility for manufacturing silicon integrated circuits and devices in support of research on process technology, device physics and modelling, innovative circuit techniques, photonics, biomedical devices, and microelectromechanical systems (MEMS).

The Industry/University Cooperative Research Center for Nanostructural Materials Research (I/UCRC for NMR) is an interdisciplinary research unit of the University of North Texas. The Center is dedicated to understanding the atomic level structure, or nanostructure, of materials used in aerospace, electronic, transportation, metallurgical and many other industries.

The Asad Abidi Research Group (AA Group) at UCLA provides information about its analog IC research and design.

The Center for Electronic Materials and Devices is an education and research center in the College of Engineering at San Jose State University. The focus is electronic materials and devices.

The New Jersey Institute of Technology (NJIT) Microelectronics Research Center is an R & D unit for the design, manufacturing, packaging, and test of integrated MEMS and CMOS devices.

The University of Louisville Lutz Microfabrication Facility is utilized for both research and instructional purposes, and provides a state-of-the-art environment for teaching both the fundamental and current fabrication techniques used to manufacture integrated circuits (ICs), discrete microelectronic devices, MEMS devices such as sensors and actuators, and various electro-optic devices.

The University of Notre Dame Microelectronics Laboratory supports extensive facilities for the fabrication and testing of electronic materials and devices with size scales down to the nanometer range and temperatures to 10 mK.

The Purdue University Wide Band Gap research page represents solid-state research relating to electronic (non-optical) devices in the wide bandgap semiconductors SiC and GaN.

The Compound Semiconductor Laboratory (CSDL), located within the Simon Fraser University Physics and Engineering Science Departments, is dedicated to the development of advanced III-V semiconductor devices.

The Center for Advanced Thin Film Technology at the University of Albany acts as a research, development, education, and economic outreach resource for industries which manufacture, use, or supply microelectronics, electronics, optoelectronics, and photonics devices and components.

The Georgia Institute of Technology Microelectronics Research Center (MiRC) provides expertise, facilities, infrastructure and teaming environments to enable and facilitate interdisciplinary research in microelectronics, integrated optoelectronics, and microsensors and actuators.

The Idaho Microfabrication Lab at Boise State University is a joint project between the College of Engineering and the College of Applied Technology for hands-on laboratory instruction of both 4-year undergraduate engineering students and 2-year technology students, as well as faculty and student research. It is also being made available to interested faculty from other BSU departments (Chemistry, Physics, Geology, Biology) as well as faculty from University of Idaho and Idaho State University.

The Compound Semiconductor Facilities at Cornell page contains Information about molecular beam epitaxy capabilities, as well as other research in compound semiconductors at Cornell.

The University of Alberta NanooFab is an open access micro and nano fabrication facility for the university community.

The goal of the University of Birmingam Nanoscale Physics Research Laboratory is to advance the frontiers of the physics, chemistry and technology of nanometre-scale structures, devices and processes.

The Tel-Aviv University MicroTechnology Laboratory is a cosortium-supported facility providing microfabrication capability and user access. Links to research projects in MEMS and other areas at Tel-Aviv University are also provided.

The University of Western Ontario Fab focuses on the fabrication of structures and devices of sub-micron scale, and is intended to be a national resource to Canadian researchers.

Operating within the School of Electrical and Electronic Engineering, the Northern Ireland Semiconductor Research Centre specialises in state of the art silicon processing and device technology with a supportive background of design and modelling skills.

The Institute for Micromanufacturing at Louisiana Tech University is engaged in the research and development of novel micro and nanosystems for biomedical, biological, environmental, information technology and other applications.

The MEMS Exchange coordinates a network of fabrication centers that lets users draft process sequences which are performed across the boundaries separating the individual facilities. The service is made available to the United States community including commercial, academic, and government organizations.

The nanoHUB is a "community computing environment" that proviides access to research grade simulation tools along with the ability to operate simulation packages through a www browser.

The Oak Ridge Center for Nanophase Materials Sciences at Oak Ridge National Laboratory is a collaborative nanoscience user research facility for the synthesis, characterization, theory/ modeling/ simulation, and design of nanoscale materials. It is one of five Nanoscale Science Research Centers currently being established by the Office of Science, U.S. Department of Energy.

The NU NUANCE center integrates three existing complementary instrumentation facilities at NU: NIFTI, EPIC, and Keck-II -under a unified management umbrella, and consolidated into contiguous space. These three facilities are a unique, centralized, and integrated resource for the NU community and beyond. NUANCE still retains the individual identity of the three facilities but their integration into contiguous space, and the unified management and operations permits synergy among instruments, techniques, training, service, technical staff and their expertise.

The University of Illinois at Chicago Microfabrication Applications Laboratory (MAL) is a regional MEMS/Nano facility that offers inexpensive access, training, service, and process guidance on a wide spectrum of micro/nano fabrication and characterization equipment. The MAL offers non-profit and industrial users a place where they can quickly prototype and manufacture their devices.

The Case Western Reserve University Microfabrication Laboratory (MFL) is a professionally staffed and managed, fully equiped facility for CMOS and non-CMOS processing.

The Yale University Center for Microelectronic Materials and Structures (uELM) has a major laboratory facility in support of uELM research and education activities, including a 2600 sq-ft class 100 Cleanroom that contains equipment for solid state device fabrication, including facilities for photolithography, wet chemical etching, oxidation, diffusion, thermal evaporation, sputtering, reactive ion etching, chemical vapor deposition, and other thin film processes.

The Integrated Microfabrication Lab (IML) at BYU is a class 10 cleanroom located on the BYU campus, used for research in solid state, optoelectronics, photonics, nanotechnology, microfabrication, MEMS, micro fluidics, etc. This site is intended to be a resource for on-site BYU users as well as visitors doing research in microfabrication and semiconductor processing.

The Arizona Micro/Nano Fabrication Center at the University of Arizona is an educational, research, and industrial resource for micro and nanofabrication in southern Arizona.

New The Microfabrication Lab at the Nanyang Technological University in Singapore consists of 330 sq.m. of Class 100 cleanroom and associated supporting facilities. It is equipped with advanced wafer fabrication equipment for the processing of 150mm silicon wafer. The mission of the MFL is to provide the common training and research facility for the researchers and students in NTU and other teaching and research institutes to conduct teaching and research in wafer fabrication technology and related microfabrication technologies, e.g. integrated micorsensors, Micro-System Technology(MST), MCM and reliability study. Apart from this, MFL also provides service to the industry through various technical collaborations and also training programmes.

About the Facilities Subway

The subway is maintained by the MIT Microsystems Technology Laboratories as a part of the Semiconductor Subway in an effort to foster education and communication in microsystems and semiconductor technology.

If you would like to add a link from the Facilities Subway to your activity or information base, please contact Duane Boning.

Maintained by Duane Boning.
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