What's New on the Laboratories Subway

Note: this page is no longer maintained.
September 3, 2007

General updates to correct changes in web links as laboratories and university microfabs have moved around on the web. The apparently broken links below have been removed from the map above (I could not immediately find a new link to the lab):

I have retained the original descriptions and links in the dated texts below. Many of these links have also changed (they are changed in the interactive subway map above), but have not yet been updated in the descriptions below.

October 20, 2006

NTU Microfabrication Lab

The Microfabrication Lab at the Nanyang Technological University in Singapore consists of 330 sq.m. of Class 100 cleanroom and associated supporting facilities. It is equipped with advanced wafer fabrication equipment for the processing of 150mm silicon wafer. The mission of the MFL is to provide the common training and research facility for the researchers and students in NTU and other teaching and research institutes to conduct teaching and research in wafer fabrication technology and related microfabrication technologies, e.g. integrated micorsensors, Micro-System Technology(MST), MCM and reliability study. Apart from this, we also provide service to the industry through various technical collaborations and also training programmes.

May 31, 2006

Arizona Micro/Nano Fabrication Center

The Arizona Micro/Nano Fabrication Center at the University of Arizona is an educational, research, and industrial resource for micro and nanofabrication in southern Arizona.

July 31, 2004

Integrated Microfabrication Lab (IML) at BYU

The IML is a class 10 cleanroom located on the BYU campus, used for research in solid state, optoelectronics, photonics, nanotechnology, microfabrication, MEMS, micro fluidics, etc. This site is intended to be a resource for on-site BYU users as well as visitors doing research in microfabrication and semiconductor processing.

August 30, 2003

Nanofabrication Facilities Compendium

A Nanofabrication Facilities Compendium has been compiled by Victor Jones at Harvard.

August 7, 2003

Yale University Center for Microelectronic Materials and Structures (uELM)

The Yale University Center for Microelectronic Materials and Structures (uELM) has a major laboratory facility in support of uELM research and education activities, including a 2600 sq-ft class 100 Cleanroom that contains equipment for solid state device fabrication, including facilities for photolithography, wet chemical etching, oxidation, diffusion, thermal evaporation, sputtering, reactive ion etching, chemical vapor deposition, and other thin film processes.

July 21, 2003

MEMS Exchange

The MEMS Exchange coordinates a network of fabrication centers that lets users draft process sequences which are performed across the boundaries separating the individual facilities. The service is made available to the United States community including commercial, academic, and government organizations.


The nanoHUB is a "community computing environment" that proviides access to research grade simulation tools along with the ability to operate simulation packages through a www browser.

Oak Ridge Center for Nanophase Materials Sciences

The Oak Ridge Center for Nanophase Materials Sciences at Oak Ridge National Laboratory is a collaborative nanoscience user research facility for the synthesis, characterization, theory/ modeling/ simulation, and design of nanoscale materials. It is one of five Nanoscale Science Research Centers currently being established by the Office of Science, U.S. Department of Energy.


The NUANCE center integrates three existing complementary instrumentation facilities at NU: NIFTI, EPIC, and Keck-II -under a unified management umbrella, and consolidated into contiguous space. These three facilities are a unique, centralized, and integrated resource for the NU community and beyond. NUANCE still retains the individual identity of the three facilities but their integration into contiguous space, and the unified management and operations permits synergy among instruments, techniques, training, service, technical staff and their expertise.

University of Illinois at Chicago Microfabrication Applications Laboratory (MAL)

The University of Illinois at Chicago Microfabrication Applications Laboratory (MAL) is a regional MEMS/Nano facility that offers inexpensive access, training, service, and process guidance on a wide spectrum of micro/nano fabrication and characterization equipment. The MAL offers non-profit and industrial users a place where they can quickly prototype and manufacture their devices.

Case Western Reserve University Microfabrication Laboratory (MFL)

The Case Western Reserve University Microfabrication Laboratory (MFL) is a professionally staffed and managed, fully equiped facility for CMOS and non-CMOS processing.

January 7, 2003

Princeton POEM Micro/Nano Fabrication Laboratory

The Princeton University Center for Photonics and OptoElectronic Materials (POEM) Micro/Nano Fabrication Laboratory is used for the microfabrication of semiconductor and MEMS devices. Substrate sizes range up to six-inch diameter, and lithographic capabilities range from micron-scale features by contact lithography down to 100 nanometer (nm) features by electron beam lithography.

Washington Technology Center

The Washington Technology Center is a state science and technology organization that funds and fosters industry-university collaborations. WTC connects entrepreneurs and scientists who often need each other to bring commercially promising ideas to fruition. Its cleanroom, located on the University of Washington Campus in Seattle, is open to industry and academic users for MEMS micromachining processing.

October 24, 2002

Louisiana Tech Institute for Micromanufacturing

The Institute for Micromanufacturing at Louisiana Tech University is engaged in the research and development of novel micro and nanosystems for biomedical, biological, environmental, information technology and other applications.

January 31, 2002

Northern Ireland Semiconductor Research Centre

Operating within the School of Electrical and Electronic Engineering, the Northern Ireland Semiconductor Research Centre specialises in state of the art silicon processing and device technology with a supportive background of design and modelling skills.

May 28, 2001

University of Western Ontario Fab

The University of Western Ontario Fab focuses on the fabrication of structures and devices of sub-micron scale, and is intended to be a national resource to Canadian researchers.

December 16, 2000

Tel-Aviv University MicroTechnology Laboratory

The Tel-Aviv University MicroTechnology Laboratory is a cosortium-supported facility providing microfabrication capability and user access. Links to research projects in MEMS and other areas at Tel-Aviv University are also provided.

August 25, 2000


The Modu-Lab site provides user information (experiments to download, exercises, slide show) for the Modu-Lab concept, a low-cost version of a semiconductor processing laboratory designed for educational purposes.

August 23, 2000

University of Birmingam Nanoscale Physics Research Laboratory

The goal of the University of Birmingam Nanoscale Physics Research Laboratory is to advance the frontiers of the physics, chemistry and technology of nanometre-scale structures, devices and processes.

March 22, 2000

University of Alberta NanoFab

The University of Alberta NanoFab is an open access micro and nano fabrication facility for the university community.

March 14, 2000

Compound Semiconductor Facilities at Cornell

Information about molecular beam epitaxy capabilities, as well as other research in compound semiconductors at Cornell.

October 4, 1999

Princeton University Nanostructures Laboratory

The mission of the Princeton NanoStructures Laboratory (NSL) is to explore and develop new nanotechnologies that will fabricate structures substantially smaller, better, and cheaper than current technology permits, and innovative nanoscale electronic, optoelectronic, and magnetic devices by combining cutting-edge nanotechnology with frontier knowledge from different disciplines.

July 21, 1999

Texas Tech PSPE

The Texas Tech Program for Semiconductor Product Engineering (PSPE) is designed to help meet the enormous demand for trained semiconductor product engineers. The Jack Maddox Research Lab laboratory facility is dedicated to PSPE.

June 30, 1999

Idaho Microfabrication Lab

The Idaho Microfabrication Lab at Boise State University is a joint project between the College of Engineering and the College of Applied Technology for hands-on laboratory instruction of both 4-year undergraduate engineering students and 2-year technology students, as well as faculty and student research. It is also being made available to interested faculty from other BSU departments (Chemistry, Physics, Geology, Biology) as well as faculty from University of Idaho and Idaho State University.

June 8, 1999

Georgia Tech Microelectronics Research Center (MiRC)

The Georgia Institute of Technology Microelectronics Research Center (MiRC) provides expertise, facilities, infrastructure and teaming environments to enable and facilitate interdisciplinary research in microelectronics, integrated optoelectronics, and microsensors and actuators.

January 24, 1998

Center for Advanced Thin Film Technology

The Center for Advanced Thin Film Technology at the University of Albany acts as a research, development, education, and economic outreach resource for industries which manufacture, use, or supply microelectronics, electronics, optoelectronics, and photonics devices and components.

December 12, 1998

NIST Electronics and Electrical Engineering Laboratory

The NIST Electronics and Electrical Engineering Laboratory promotes U.S. economic growth by providing measurement capability of high impact focused primarily on the critical needs of the U.S. electronics and electrical industries, and their customers and suppliers.

August 13, 1998

Compound Semiconductor Laboratory (CSDL)

The Compound Semiconductor Laboratory (CSDL), located within the Simon Fraser University Physics and Engineering Science Departments, is dedicated to the development of advanced III-V semiconductor devices.

March 29, 1998

Purdue University Wide Band Gap Research

The Purdue University Wide Band Gap research page represents solid-state research relating to electronic (non-optical) devices in the wide bandgap semiconductors SiC and GaN. It also contains links to a large number of related activities at Purdue.

February 8, 1998

University of Notre Dame Microelectronics Laboratory

The University of Notre Dame Microelectronics Laboratory supports extensive facilities for the fabrication and testing of electronic materials and devices with size scales down to the nanometer range and temperatures to 10 mK.

November 21, 1997

University of Louisville Lutz Microfabrication Facility

The Lutz Microfabrication Facility is utilized for both research and instructional purposes, and provides a state-of-the-art environment for teaching both the fundamental and current fabrication techniques used to manufacture integrated circuits (ICs), discrete microelectronic devices, MEMS devices such as sensors and actuators, and various electro-optic devices.

December 4, 1996

NJIT Microelectronics Research Center

The New Jersey Institute of Technology (NJIT) Microelectronics Research Center is an R & D unit for the design, manufacturing, packaging, and test of integrated MEMS and CMOS devices.

September 1, 1996

University of Toronto EMG

The University of Toronto Electronic Materials Group has processing, characterization, and computation facilities, and conducts a range of research projects in electronic materials.

May 26, 1996

San Jose State Center for Electronic Materials and Devices

The Center for Electronic Materials and Devices is an education and research center in the College of Engineering at San Jose State University. The focus is electronic materials and devices.

Research Triangle Center for Semiconductor Research

The Research Triangle Center for Semiconductor Research has a primary focus on GaAs- and InP-based heterojunction bipolar transistor (HBT) devices and circuits for a variety of electronic and optoelectronic applications

April 12, 1996

Asad Abidi Research Group at UCLA

The Asad Abidi Research Group (AA Group) at UCLA provides information about its analog IC research and design.

April 9, 1996

Nanostructural Materials Research at UNT

The Industry/University Cooperative Research Center for Nanostructural Materials Research (I/UCRC for NMR) is an interdisciplinary research unit of the University of North Texas. The Center is dedicated to understanding the atomic level structure, or nanostructure, of materials used in aerospace, electronic, transportation, metallurgical and many other industries.

March 19, 1996

Microelectronics Fabrication Laboratory

Carleton University's Microelectronics Fabrication Laboratory (MFL) is a flexible facility for manufacturing silicon integrated circuits and devices in support of research on process technology, device physics and modelling, innovative circuit techniques, photonics, biomedical devices, and microelectromechanical systems (MEMS).

February 19, 1996

Microcontamination Research Laboratory

The Microcontamination Research Laboratory at Clarkson University conducts research into particle generation, deposition, and transport in semiconductor process equipment.

Centre for Electronic Materials (CEM)

The Centre for Electronic Materials (CEM) provides information about its research and postgraduate teaching related to electronic materials. The CEM also maintains an organized and searchable database of conferences and meetings related to semiconductors and electronic materials.

January 24, 1996

NCSU Center for Advanced Electronic Materials Processing

The North Carolina Center for Advanced Electronic Materials Processing is developing technologies for in situ , single-wafer processing (cleaning, deposition, etching). The program deals with automation and control of the individual processes and their integration into single-wafer processing module clusters.

January 3, 1996

Minnesota Microtechnology Laboratory

The Microtechnology Laboratory (MTL), is an interdisciplinary facility that supports faculty research within the Institute of Technology to enhance its threefold mission of education, research and industrial collaboration.

November 16, 1995

Penn State Electronic Materials and Processing Research Laboratory

The Penn State Electronic Materials and Processing Research Laboratory (EMPRL) offers substantial WWW information on its existing and new facilities, personnel, and programs.

November 9, 1995

Electronic Materials Research Group (U of Washington)

The Electronic Materials Research Group at the University of Washington has a major research effort in the synthesis and characterization of electronic materials from silicon to gallium nitride.

September 26, 1995

Laboratory for the Integration of Sensors and Actuators (LISA)

The Laboratory for the Integration of Sensors and Actuators (LISA) at the Universityof Montreal does research on MEMS, high speed devices on III-V heterostructures, opto-electronics, selective ionic membranes bases on Nasicon, and integrated gas sensors.

September 8, 1995

University of Michigan Solid State Electronics Laboratory

The Solid State Electronics Laboratory at the University of Michigan provides information about the work of its III-V Integrated Devices and Circuits Group.

Alabama Microelectronics Science and Technology Center (AMSTC)

The AMSTC at Auburn University provides information about its interdisciplinary efforts to advance microelectronics education and technology.

UC Davis Microfabrication Facility

The UC Davis Microfabrication Facility researches microelectronics, MEMs, and optoelectronics and explores new applications of these technologies.

August 6, 1995

ASU Center for Solid State Electronic Research

The Center for Solid State Electronic Research at Arizona State University is a cross-disciplinary center with research in compound semiconductors, nanostructures, silicon technologies, and ULSI modeling and design.

June 11, 1995

National Nanofabrication Facility at Cornell

Cornell University provides the Nanoline information server describing fabrication services provided by the National Nanofabrication Facility as part of the National Nanofabrication User Network (NNUN).

May 11, 1995

Rochester Institute of Technology

RIT provides information about its Microelectronics research and facilities.

March 14, 1995

Facilities Subway

The Facilities Subway was created because the Semiconductor Subway has become large and unmanageable as a single subway. This subway includes foundries and university facilities.

March 8, 1995

Center for Compound Semiconductor Microelectronics (CCSM)

CCSM is an NSF Engineering Research Center located at the University of Illinois. Information about their research in optoelectronics is available.

Nanoelectronics Laboratory

The Nanoelectronics Laboratory at the University of Cincinnati provides information about its research at the nanometer scale in semiconductors and other electronic materials.

March 6, 1995

Northeastern University Electron Devices Group

The Electron Devices Research Group at Northeastern has an expanding network of laboratories serving faculty and graduate students. Laboratory capabilities currently include microfabrication, microwave materials fabrication and characterization, plasma measurements and processing, noise measurements, microwave device characterization, and VLSI design.

February 20, 1995

University of Texas at Austin MRC

This is an interdisciplinary Microelectronics Research Center which provides information about its research groups and interests.

February 16, 1995

Berkeley Computer-Aided Manufacturing (BCAM)

The Berkeley BCAM group was formed to facilitate and improve semiconductor processing at the equipment level with research in the areas of real-time equipment control, multistep supervisory control, and IC design for manufacturability.

Maintained by Duane Boning.
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