MTL News Archives for 2016

Smith awarded IEEE Noyce Medal


December 5, 2016

Henry Smith, professor emeritus of electrical engineering, recognized for contributions to field of nanofabrication.

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Henry I. Smith, professor emeritus of electrical engineering, has been awarded the 2017 IEEE Robert N. Noyce Medal in recognition of his "contributions to lithography and nanopatterning through experimental advances in short-wavelength exposure systems and attenuated phase-shift masks." Photo courtesy of RLE/Nathan Fiske

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