MTL Fabrication

Equipment

ICL | TRL | EML | ALL

Integrated Circuits Laboratory (ICL)

Lithography

Diffusion, Oxidation, and Chemical Vapor Deposition

Dielectric Deposition

Etching

Metal Deposition

Metrology

Polishing/Etching

Technology Research Laboratory (TRL)

Lithography

Diffusion and Oxidation

Chemical Vapor Deposition

Etching

Metal Deposition

Metrology

Exploratory Materials Laboratory (EML)

Lithography

Diffusion

Chemical Vapor Deposition/Etching

Metal Deposition

Metrology

Serving all Fabrication Laboratories:

Inspection and Test

Assembly