{"id":1640,"date":"2013-07-09T18:47:35","date_gmt":"2013-07-09T18:47:35","guid":{"rendered":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/files\/2013\/07\/vardi_finfet_01.png"},"modified":"2013-07-09T18:47:35","modified_gmt":"2013-07-09T18:47:35","slug":"vardi_finfet_01","status":"inherit","type":"attachment","link":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/towards-a-self-aligned-ingaas-trigate-mosfet\/vardi_finfet_01\/","title":{"rendered":"Figure 1"},"author":370,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"description":{"rendered":"<p class=\"attachment\"><a href='https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/vardi_finfet_01.png' rel=\"lightbox[1640]\"><img width=\"300\" height=\"197\" src=\"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/vardi_finfet_01-300x197.png\" class=\"attachment-medium size-medium\" alt=\"\" loading=\"lazy\" srcset=\"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/vardi_finfet_01-300x197.png 300w, https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/vardi_finfet_01-220x145.png 220w, https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/vardi_finfet_01.png 643w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/a><\/p>\n"},"caption":{"rendered":"<p>Figure 1: Fin etch test structures: array of 100-nm fins (pitch 200 nm). Inset: demonstration of the fin geometry that we obtain in our process; the fin is 19-nm in width and 218-nm in height. <\/p>\n"},"alt_text":"","media_type":"image","mime_type":"image\/png","media_details":{"width":643,"height":424,"file":"2013\/07\/vardi_finfet_01.png","sizes":{"thumbnail":{"file":"vardi_finfet_01-150x150.png","width":150,"height":150,"mime_type":"image\/png","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/vardi_finfet_01-150x150.png"},"medium":{"file":"vardi_finfet_01-300x197.png","width":300,"height":197,"mime_type":"image\/png","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/vardi_finfet_01-300x197.png"},"post-thumbnail":{"file":"vardi_finfet_01-150x150.png","width":150,"height":150,"mime_type":"image\/png","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/vardi_finfet_01-150x150.png"},"abstract-thumb":{"file":"vardi_finfet_01-220x145.png","width":220,"height":145,"mime_type":"image\/png","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/vardi_finfet_01-220x145.png"},"full":{"file":"vardi_finfet_01.png","width":643,"height":424,"mime_type":"image\/png","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/vardi_finfet_01.png"}},"image_meta":{"aperture":0,"credit":"","camera":"","caption":"","created_timestamp":0,"copyright":"","focal_length":0,"iso":0,"shutter_speed":0,"title":""}},"post":1639,"source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/vardi_finfet_01.png","_links":{"self":[{"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/media\/1640"}],"collection":[{"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/media"}],"about":[{"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/types\/attachment"}],"author":[{"embeddable":true,"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/users\/370"}],"replies":[{"embeddable":true,"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/comments?post=1640"}]}}