{"id":1598,"date":"2013-07-09T15:31:56","date_gmt":"2013-07-09T15:31:56","guid":{"rendered":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/files\/2013\/07\/manfrinato_ebeam_figure2.jpg"},"modified":"2013-07-09T15:31:56","modified_gmt":"2013-07-09T15:31:56","slug":"manfrinato_ebeam_figure2-2","status":"inherit","type":"attachment","link":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/resolution-limits-of-electron-beam-lithography-toward-the-atomic-scale\/manfrinato_ebeam_figure2-2\/","title":{"rendered":"manfrinato_ebeam_figure2"},"author":370,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"description":{"rendered":"

\"\"<\/a><\/p>\n"},"caption":{"rendered":"

Figure 2: Calculated energy-density contrast, K(p)=(Emax-Emin)\/(Emax+Emin), for the fabrication of two adjacent posts at 30 and 200 keV exposures. The blue and red curves were calculated using the fitted PSF for 30 and 200 keV, respectively. The black curve is based on the calculated PSF, predicting higher resolution than using the fitted PSF at 200 keV.<\/p>\n"},"alt_text":"","media_type":"image","mime_type":"image\/jpeg","media_details":{"width":600,"height":466,"file":"2013\/07\/manfrinato_ebeam_figure2.jpg","sizes":{"thumbnail":{"file":"manfrinato_ebeam_figure2-150x150.jpg","width":150,"height":150,"mime_type":"image\/jpeg","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/manfrinato_ebeam_figure2-150x150.jpg"},"medium":{"file":"manfrinato_ebeam_figure2-300x233.jpg","width":300,"height":233,"mime_type":"image\/jpeg","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/manfrinato_ebeam_figure2-300x233.jpg"},"post-thumbnail":{"file":"manfrinato_ebeam_figure2-150x150.jpg","width":150,"height":150,"mime_type":"image\/jpeg","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/manfrinato_ebeam_figure2-150x150.jpg"},"abstract-thumb":{"file":"manfrinato_ebeam_figure2-220x170.jpg","width":220,"height":170,"mime_type":"image\/jpeg","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/manfrinato_ebeam_figure2-220x170.jpg"},"full":{"file":"manfrinato_ebeam_figure2.jpg","width":600,"height":466,"mime_type":"image\/jpeg","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/manfrinato_ebeam_figure2.jpg"}},"image_meta":{"aperture":0,"credit":"","camera":"","caption":"","created_timestamp":0,"copyright":"","focal_length":0,"iso":0,"shutter_speed":0,"title":""}},"post":1596,"source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/manfrinato_ebeam_figure2.jpg","_links":{"self":[{"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/media\/1598"}],"collection":[{"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/media"}],"about":[{"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/types\/attachment"}],"author":[{"embeddable":true,"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/users\/370"}],"replies":[{"embeddable":true,"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/comments?post=1598"}]}}