{"id":1597,"date":"2013-07-09T15:31:55","date_gmt":"2013-07-09T15:31:55","guid":{"rendered":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/files\/2013\/07\/manfrinato_ebeam_figure1.jpg"},"modified":"2013-07-09T15:31:55","modified_gmt":"2013-07-09T15:31:55","slug":"manfrinato_ebeam_figure1-2","status":"inherit","type":"attachment","link":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/resolution-limits-of-electron-beam-lithography-toward-the-atomic-scale\/manfrinato_ebeam_figure1-2\/","title":{"rendered":"Figure 1"},"author":370,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"description":{"rendered":"<p class=\"attachment\"><a href='https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/manfrinato_ebeam_figure1.jpg' rel=\"lightbox[1597]\"><img width=\"291\" height=\"300\" src=\"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/manfrinato_ebeam_figure1-291x300.jpg\" class=\"attachment-medium size-medium\" alt=\"\" loading=\"lazy\" srcset=\"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/manfrinato_ebeam_figure1-291x300.jpg 291w, https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/manfrinato_ebeam_figure1-213x220.jpg 213w, https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/manfrinato_ebeam_figure1.jpg 600w\" sizes=\"(max-width: 291px) 100vw, 291px\" \/><\/a><\/p>\n"},"caption":{"rendered":"<p>Figure 1: TEM micrographs of 10-nm-thick HSQ on 10-nm-thick SiNx membrane substrate, exposed at 200 keV. (A) 10-nm-half-pitch HSQ dot array with 5.1\u00b1 0.8 nm feature size. (B) 5-nm-half-pitch HSQ dot array with 5.6 \u00b1 1.2 nm feature size. The dose was (A) 18 and (B) 6 fC\/dot. (C) and (D) are typical ~2 nm feature size with 8 nC\/cm linear dose.<\/p>\n"},"alt_text":"","media_type":"image","mime_type":"image\/jpeg","media_details":{"width":600,"height":617,"file":"2013\/07\/manfrinato_ebeam_figure1.jpg","sizes":{"thumbnail":{"file":"manfrinato_ebeam_figure1-150x150.jpg","width":150,"height":150,"mime_type":"image\/jpeg","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/manfrinato_ebeam_figure1-150x150.jpg"},"medium":{"file":"manfrinato_ebeam_figure1-291x300.jpg","width":291,"height":300,"mime_type":"image\/jpeg","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/manfrinato_ebeam_figure1-291x300.jpg"},"post-thumbnail":{"file":"manfrinato_ebeam_figure1-150x150.jpg","width":150,"height":150,"mime_type":"image\/jpeg","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/manfrinato_ebeam_figure1-150x150.jpg"},"abstract-thumb":{"file":"manfrinato_ebeam_figure1-213x220.jpg","width":213,"height":220,"mime_type":"image\/jpeg","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/manfrinato_ebeam_figure1-213x220.jpg"},"full":{"file":"manfrinato_ebeam_figure1.jpg","width":600,"height":617,"mime_type":"image\/jpeg","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/manfrinato_ebeam_figure1.jpg"}},"image_meta":{"aperture":0,"credit":"","camera":"","caption":"","created_timestamp":0,"copyright":"","focal_length":0,"iso":0,"shutter_speed":0,"title":""}},"post":1596,"source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/manfrinato_ebeam_figure1.jpg","_links":{"self":[{"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/media\/1597"}],"collection":[{"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/media"}],"about":[{"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/types\/attachment"}],"author":[{"embeddable":true,"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/users\/370"}],"replies":[{"embeddable":true,"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/comments?post=1597"}]}}