{"id":1553,"date":"2013-07-08T20:33:26","date_gmt":"2013-07-08T20:33:26","guid":{"rendered":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/files\/2013\/07\/yu_intrinsicstress_01.png"},"modified":"2013-07-08T20:33:26","modified_gmt":"2013-07-08T20:33:26","slug":"yu_intrinsicstress_01-2","status":"inherit","type":"attachment","link":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/mechanisms-for-intrinsic-stress-evolution-during-deposition-of-polycrystalline-films\/yu_intrinsicstress_01-2\/","title":{"rendered":"Figure 1"},"author":370,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"description":{"rendered":"<p class=\"attachment\"><a href='https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/yu_intrinsicstress_01.png' rel=\"lightbox[1553]\"><img width=\"300\" height=\"265\" src=\"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/yu_intrinsicstress_01-300x265.png\" class=\"attachment-medium size-medium\" alt=\"Figure 1\" loading=\"lazy\" srcset=\"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/yu_intrinsicstress_01-300x265.png 300w, https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/yu_intrinsicstress_01-220x194.png 220w, https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/yu_intrinsicstress_01.png 568w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/a><\/p>\n"},"caption":{"rendered":"<p>Problems caused by residual stress in MEMS ((C. T. Leondes, MEMS\/NEMS : handbook techniques and applications ,Springer, New York, 2006).)).  <\/p>\n"},"alt_text":"Figure 1","media_type":"image","mime_type":"image\/png","media_details":{"width":568,"height":503,"file":"2013\/07\/yu_intrinsicstress_01.png","sizes":{"thumbnail":{"file":"yu_intrinsicstress_01-150x150.png","width":150,"height":150,"mime_type":"image\/png","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/yu_intrinsicstress_01-150x150.png"},"medium":{"file":"yu_intrinsicstress_01-300x265.png","width":300,"height":265,"mime_type":"image\/png","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/yu_intrinsicstress_01-300x265.png"},"post-thumbnail":{"file":"yu_intrinsicstress_01-150x150.png","width":150,"height":150,"mime_type":"image\/png","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/yu_intrinsicstress_01-150x150.png"},"abstract-thumb":{"file":"yu_intrinsicstress_01-220x194.png","width":220,"height":194,"mime_type":"image\/png","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/yu_intrinsicstress_01-220x194.png"},"full":{"file":"yu_intrinsicstress_01.png","width":568,"height":503,"mime_type":"image\/png","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/yu_intrinsicstress_01.png"}},"image_meta":{"aperture":0,"credit":"","camera":"","caption":"","created_timestamp":0,"copyright":"","focal_length":0,"iso":0,"shutter_speed":0,"title":""}},"post":1551,"source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/yu_intrinsicstress_01.png","_links":{"self":[{"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/media\/1553"}],"collection":[{"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/media"}],"about":[{"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/types\/attachment"}],"author":[{"embeddable":true,"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/users\/370"}],"replies":[{"embeddable":true,"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/comments?post=1553"}]}}