{"id":1538,"date":"2013-07-08T20:12:42","date_gmt":"2013-07-08T20:12:42","guid":{"rendered":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/files\/2013\/07\/wang_resonator_02.png"},"modified":"2013-07-08T20:12:42","modified_gmt":"2013-07-08T20:12:42","slug":"wang_resonator_02","status":"inherit","type":"attachment","link":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/deep-trench-capacitor-drive-of-unreleased-si-mems-resonator\/wang_resonator_02\/","title":{"rendered":"Figure 2"},"author":370,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"description":{"rendered":"

\"\"<\/a><\/p>\n"},"caption":{"rendered":"

Figure 2: Measured frequency response of DT resonators with 7.2-\u00b5m-long resonant cavity, DT length of 950 nm, and 1.7-\u00b5m DT pitch in the ABRs. Device with 50 ABRs is shown. Wide frequency sweeps show no spurious modes in a multi-GHz range.<\/p>\n"},"alt_text":"","media_type":"image","mime_type":"image\/png","media_details":{"width":742,"height":661,"file":"2013\/07\/wang_resonator_02.png","sizes":{"thumbnail":{"file":"wang_resonator_02-150x150.png","width":150,"height":150,"mime_type":"image\/png","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/wang_resonator_02-150x150.png"},"medium":{"file":"wang_resonator_02-300x267.png","width":300,"height":267,"mime_type":"image\/png","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/wang_resonator_02-300x267.png"},"post-thumbnail":{"file":"wang_resonator_02-150x150.png","width":150,"height":150,"mime_type":"image\/png","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/wang_resonator_02-150x150.png"},"abstract-thumb":{"file":"wang_resonator_02-220x195.png","width":220,"height":195,"mime_type":"image\/png","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/wang_resonator_02-220x195.png"},"full":{"file":"wang_resonator_02.png","width":742,"height":661,"mime_type":"image\/png","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/wang_resonator_02.png"}},"image_meta":{"aperture":0,"credit":"","camera":"","caption":"","created_timestamp":0,"copyright":"","focal_length":0,"iso":0,"shutter_speed":0,"title":""}},"post":1536,"source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/wang_resonator_02.png","_links":{"self":[{"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/media\/1538"}],"collection":[{"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/media"}],"about":[{"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/types\/attachment"}],"author":[{"embeddable":true,"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/users\/370"}],"replies":[{"embeddable":true,"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/comments?post=1538"}]}}