{"id":1537,"date":"2013-07-08T20:12:38","date_gmt":"2013-07-08T20:12:38","guid":{"rendered":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/files\/2013\/07\/wang_resonator_01.png"},"modified":"2013-07-08T20:12:38","modified_gmt":"2013-07-08T20:12:38","slug":"wang_resonator_01","status":"inherit","type":"attachment","link":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/deep-trench-capacitor-drive-of-unreleased-si-mems-resonator\/wang_resonator_01\/","title":{"rendered":"Figure 1"},"author":370,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"description":{"rendered":"<p class=\"attachment\"><a href='https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/wang_resonator_01.png' rel=\"lightbox[1537]\"><img width=\"271\" height=\"300\" src=\"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/wang_resonator_01-271x300.png\" class=\"attachment-medium size-medium\" alt=\"\" loading=\"lazy\" srcset=\"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/wang_resonator_01-271x300.png 271w, https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/wang_resonator_01-926x1024.png 926w, https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/wang_resonator_01-198x220.png 198w, https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/wang_resonator_01.png 936w\" sizes=\"(max-width: 271px) 100vw, 271px\" \/><\/a><\/p>\n"},"caption":{"rendered":"<p>Figure 1: Scanning electron micrographs (top) and schematic (bottom) of unreleased deep trench (DT) MEMS resonator. Acoustic Bragg reflectors (ABRs) formed from periodically spaced DTs define a high-Q resonant cavity in the center of the device. DT capacitors inside the resonant cavity form electrostatic drive and sense transducers.<\/p>\n"},"alt_text":"","media_type":"image","mime_type":"image\/png","media_details":{"width":936,"height":1035,"file":"2013\/07\/wang_resonator_01.png","sizes":{"thumbnail":{"file":"wang_resonator_01-150x150.png","width":150,"height":150,"mime_type":"image\/png","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/wang_resonator_01-150x150.png"},"medium":{"file":"wang_resonator_01-271x300.png","width":271,"height":300,"mime_type":"image\/png","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/wang_resonator_01-271x300.png"},"large":{"file":"wang_resonator_01-926x1024.png","width":926,"height":1024,"mime_type":"image\/png","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/wang_resonator_01-926x1024.png"},"post-thumbnail":{"file":"wang_resonator_01-150x150.png","width":150,"height":150,"mime_type":"image\/png","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/wang_resonator_01-150x150.png"},"abstract-thumb":{"file":"wang_resonator_01-198x220.png","width":198,"height":220,"mime_type":"image\/png","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/wang_resonator_01-198x220.png"},"full":{"file":"wang_resonator_01.png","width":936,"height":1035,"mime_type":"image\/png","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/wang_resonator_01.png"}},"image_meta":{"aperture":0,"credit":"","camera":"","caption":"","created_timestamp":0,"copyright":"","focal_length":0,"iso":0,"shutter_speed":0,"title":""}},"post":1536,"source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/wang_resonator_01.png","_links":{"self":[{"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/media\/1537"}],"collection":[{"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/media"}],"about":[{"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/types\/attachment"}],"author":[{"embeddable":true,"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/users\/370"}],"replies":[{"embeddable":true,"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/comments?post=1537"}]}}