{"id":1510,"date":"2013-07-08T18:43:48","date_gmt":"2013-07-08T18:43:48","guid":{"rendered":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/files\/2013\/07\/murarka_contactprintedMEMS_01.png"},"modified":"2013-07-08T18:43:48","modified_gmt":"2013-07-08T18:43:48","slug":"murarka_contactprintedmems_01-2","status":"inherit","type":"attachment","link":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/contact-printed-mems-membranes\/murarka_contactprintedmems_01-2\/","title":{"rendered":"Figure 1"},"author":370,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"description":{"rendered":"<p class=\"attachment\"><a href='https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/murarka_contactprintedMEMS_01.png' rel=\"lightbox[1510]\"><img width=\"152\" height=\"300\" src=\"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/murarka_contactprintedMEMS_01-152x300.png\" class=\"attachment-medium size-medium\" alt=\"\" loading=\"lazy\" srcset=\"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/murarka_contactprintedMEMS_01-152x300.png 152w, https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/murarka_contactprintedMEMS_01-519x1024.png 519w, https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/murarka_contactprintedMEMS_01-111x220.png 111w, https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/murarka_contactprintedMEMS_01.png 522w\" sizes=\"(max-width: 152px) 100vw, 152px\" \/><\/a><\/p>\n"},"caption":{"rendered":"<p>Figure 1: Deflection profiles of gold membranes under electrostatic actuation, obtained via optical interferometry. (a) Deflection of the membrane increases as the voltage applied between the membrane and the Si substrate increases. (b) 13 different diametrical deflection profiles (inset: interferometry image) of a membrane under 15 V actuation are plotted and averaged to show the mean profile. (c) Gold membrane deflection over multiple cavities covered by a single membrane, as the voltage is increased from 1 V to 15 V.  <\/p>\n"},"alt_text":"","media_type":"image","mime_type":"image\/png","media_details":{"width":522,"height":1029,"file":"2013\/07\/murarka_contactprintedMEMS_01.png","sizes":{"thumbnail":{"file":"murarka_contactprintedMEMS_01-150x150.png","width":150,"height":150,"mime_type":"image\/png","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/murarka_contactprintedMEMS_01-150x150.png"},"medium":{"file":"murarka_contactprintedMEMS_01-152x300.png","width":152,"height":300,"mime_type":"image\/png","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/murarka_contactprintedMEMS_01-152x300.png"},"large":{"file":"murarka_contactprintedMEMS_01-519x1024.png","width":519,"height":1024,"mime_type":"image\/png","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/murarka_contactprintedMEMS_01-519x1024.png"},"post-thumbnail":{"file":"murarka_contactprintedMEMS_01-150x150.png","width":150,"height":150,"mime_type":"image\/png","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/murarka_contactprintedMEMS_01-150x150.png"},"abstract-thumb":{"file":"murarka_contactprintedMEMS_01-111x220.png","width":111,"height":220,"mime_type":"image\/png","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/murarka_contactprintedMEMS_01-111x220.png"},"full":{"file":"murarka_contactprintedMEMS_01.png","width":522,"height":1029,"mime_type":"image\/png","source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/murarka_contactprintedMEMS_01.png"}},"image_meta":{"aperture":0,"credit":"","camera":"","caption":"","created_timestamp":0,"copyright":"","focal_length":0,"iso":0,"shutter_speed":0,"title":""}},"post":1509,"source_url":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-content\/blogs.dir\/22\/files\/2013\/07\/murarka_contactprintedMEMS_01.png","_links":{"self":[{"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/media\/1510"}],"collection":[{"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/media"}],"about":[{"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/types\/attachment"}],"author":[{"embeddable":true,"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/users\/370"}],"replies":[{"embeddable":true,"href":"https:\/\/mtlsites.mit.edu\/annual_reports\/2013\/wp-json\/wp\/v2\/comments?post=1510"}]}}