<\/a>Figure 2: SEM image of memory transistor after removing the dummy poly gate and schematic cross section of the transistor.<\/p><\/div>\n
This study investigates charge-storage behavior in a series of molecular thin films embedded in metal-oxide-semiconductor (MOS) structures with SiO2<\/sub> and Al2<\/sub>O3<\/sub> as the tunneling and control oxides, respectively.\u00a0 By comparing performance of different devices, we identify the molecular thin-film characteristics best suited for design of floating-gate memories. We fabricate capacitive memory structures using archetypical molecular thin films with different charge-storage energy levels and charge mobility including 3,4,9,10-perylenetetracarboxylic dianhydride (PTCDA), 3,4,9,10- perylenetetracarboxylic bis-benzimidazole (PTCBI), tris-(8-hydroxyquinoline) aluminum (Alq3), and fullerene (C60<\/sub>).<\/p>\nThe stored charge densities are determined by measuring the shift in the flat band voltage of molecular-film-containing capacitors. Data shows that charge retention times are improved for molecular films with lower carrier mobility, which for the first time confirms the stated operational benefit of the nano-segmented floating-gate structures, i.e., that lower charge mobility in the nano-segmented floating gate inhibits stored charge loss.<\/p>\n
The initial results show device durability over 105<\/sup> program\/erase cycles, with a hysteresis window of up to 12.8V, corresponding to charge storage density as high as 1.3 x 1013<\/sup> cm-2<\/sup>.<\/p>\nAs the next step we are working on fabrication of CMOS-compatible organic memory transistors using gate-last fabrication process, in which source and drain regions are defined using a dummy poly gate that is removed during the process.<\/p>\n
\nReferences<\/p>\n