{"id":1715,"date":"2010-07-12T14:21:29","date_gmt":"2010-07-12T18:21:29","guid":{"rendered":"https:\/\/wpmu2.mit.local\/?p=1715"},"modified":"2010-07-12T14:21:29","modified_gmt":"2010-07-12T18:21:29","slug":"design-of-a-three-axis-mems-force-sensor","status":"publish","type":"post","link":"https:\/\/wpmu2.mit.local\/design-of-a-three-axis-mems-force-sensor\/","title":{"rendered":"Design of a Three-axis MEMS Force-sensor"},"content":{"rendered":"<div class=\"page-restrict-output\"><div id=\"attachment_1716\" style=\"width: 310px\" class=\"wp-caption alignright\"><a href=\"https:\/\/wpmu2.mit.local\/files\/2010\/07\/panas_fig01.png\"><img aria-describedby=\"caption-attachment-1716\" loading=\"lazy\" class=\"size-medium wp-image-1716\" title=\"Figure 1\" src=\"https:\/\/wpmu2.mit.local\/files\/2010\/07\/panas_fig01-300x248.png\" alt=\"Figure 1\" width=\"300\" height=\"248\" srcset=\"https:\/\/wpmu2.mit.local\/wp-content\/uploads\/2010\/07\/panas_fig01-300x248.png 300w, https:\/\/wpmu2.mit.local\/wp-content\/uploads\/2010\/07\/panas_fig01.png 482w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/a><p id=\"caption-attachment-1716\" class=\"wp-caption-text\">Figure 1: A 3-axis force sensor with polysilicon strain gauges on the flexure beams.<\/p><\/div>\n<p>Multi-axis force-sensing at the micro-scale is necessary for a wide range of applications in biology, materials science, and nanomanufacturing.\u00a0 A three-degree-of-freedom force-sensor (Figure 1) was designed that is capable of accurately and precisely measuring the adhesion forces (nanoNewtons) between biologically active surfaces.\u00a0 This force sensor is positioned and actuated using a Hexflex nanopositioner and Lorenz force actuators.\u00a0 The fabricated device is shown in Figure 2.<\/p>\n<p>In order to design high-accuracy, high-precision, multi-axis MEMS force sensors, a closed-form model was developed to optimize the strain-sensitivity of the MEMS force-sensor.\u00a0 This model first sets constraints on the system due to package size, fabrication techniques, desired degrees of freedom, and force range.\u00a0 The layout of the flexure system is optimized to meet the kinematic and manufacturing constraints of the MEMS force-sensor.\u00a0 The geometry of the flexures is set to maximize the strain at the sensor locations.<\/p>\n<div id=\"attachment_1717\" style=\"width: 302px\" class=\"wp-caption alignright\"><a href=\"https:\/\/wpmu2.mit.local\/files\/2010\/07\/panas_fig02.png\"><img aria-describedby=\"caption-attachment-1717\" loading=\"lazy\" class=\"size-medium wp-image-1717\" title=\"Figure 2\" src=\"https:\/\/wpmu2.mit.local\/files\/2010\/07\/panas_fig02-292x300.png\" alt=\"Figure 2\" width=\"292\" height=\"300\" srcset=\"https:\/\/wpmu2.mit.local\/wp-content\/uploads\/2010\/07\/panas_fig02-292x300.png 292w, https:\/\/wpmu2.mit.local\/wp-content\/uploads\/2010\/07\/panas_fig02.png 374w\" sizes=\"(max-width: 292px) 100vw, 292px\" \/><\/a><p id=\"caption-attachment-1717\" class=\"wp-caption-text\">Figure 2: Fabricated 3-axis force sensor.<\/p><\/div>\n<p>This model was incorporated into a thermal\/electric model to fully characterize all of the inputs to the system.\u00a0 The resolution of the force-sensor is a function of the noise from the strain-sensors, the noise in the electronics, the thermomechanical noise, and the sensitivity of the strain-sensors to a force input.\u00a0 Based on this model, the dominant noise sources are identified and the sensor system is optimized to reduce these noise sources.\u00a0 The thermal\/electric model is also used to determine the major factors limiting accuracy of the force-sensor.\u00a0 In most cases, the drifts in both the electronics and sensors caused by fluctuations in room temperature were the major sources of accuracy errors.\u00a0 Therefore, an environmental enclosure with closed-loop control over temperature was designed to reduce the thermal variation.\u00a0 Overall, the final design of the force sensor is capable of producing sub-nanoNewton-resolution force measurements with nanoNewton-level accuracy.<\/p>\n<\/div>","protected":false},"excerpt":{"rendered":"<div class=\"page-restrict-output\"><p>Multi-axis force-sensing at the micro-scale is necessary for a wide range of applications in biology, materials science, and nanomanufacturing.\u00a0 A&#8230;<\/p>\n<\/div>","protected":false},"author":2,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[29],"tags":[4188,4187],"_links":{"self":[{"href":"https:\/\/wpmu2.mit.local\/wp-json\/wp\/v2\/posts\/1715"}],"collection":[{"href":"https:\/\/wpmu2.mit.local\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/wpmu2.mit.local\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/wpmu2.mit.local\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/wpmu2.mit.local\/wp-json\/wp\/v2\/comments?post=1715"}],"version-history":[{"count":2,"href":"https:\/\/wpmu2.mit.local\/wp-json\/wp\/v2\/posts\/1715\/revisions"}],"predecessor-version":[{"id":1719,"href":"https:\/\/wpmu2.mit.local\/wp-json\/wp\/v2\/posts\/1715\/revisions\/1719"}],"wp:attachment":[{"href":"https:\/\/wpmu2.mit.local\/wp-json\/wp\/v2\/media?parent=1715"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/wpmu2.mit.local\/wp-json\/wp\/v2\/categories?post=1715"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/wpmu2.mit.local\/wp-json\/wp\/v2\/tags?post=1715"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}