{"id":1524,"date":"2010-07-08T12:37:00","date_gmt":"2010-07-08T16:37:00","guid":{"rendered":"https:\/\/wpmu2.mit.local\/?p=1524"},"modified":"2010-07-08T12:37:00","modified_gmt":"2010-07-08T16:37:00","slug":"component-integration-of-a-micro-gas-analyzer","status":"publish","type":"post","link":"https:\/\/wpmu2.mit.local\/component-integration-of-a-micro-gas-analyzer\/","title":{"rendered":"Component Integration of a Micro-gas Analyzer"},"content":{"rendered":"
\"Figure<\/a>

Figure 1: Testing jig for the carbon-nanotube-based electron impact ionizers.<\/p><\/div>\n

The Micro-Gas Analyzer Project attempts to leverage the cost reduction, performance enhancement, and increased portability associated with MEMS to create a microfabricated mass spectrometer for chemical species detection.\u00a0 Mass spectrometers are powerful analytical instruments that are mainly comprised of an ionizer, a mass analyzer, a detector, and a vacuum pump.\u00a0 Our group and collaborators have made substantial progress on these various components, spanning carbon-nanotube-based electron impact ionizers [1<\/a>]<\/sup>, chip-scaled quadrupole mass filters with square electrodes [2<\/a>]<\/sup>, and time-modulated capacitance electrometers [3<\/a>]<\/sup>.\u00a0 Each component functions and performs adequately on its own, but a complete system requires the integration of these three parts, as demonstrated by other researchers [4<\/a>]<\/sup> [5<\/a>]<\/sup>.<\/p>\n

\"Figure<\/a>

Figure 2: Mounted time-modulated capacitance electrometer made by our collaborators at the University of Cambridge, UK.<\/p><\/div>\n

An integration plan was conceived to sequentially combine the various components in a logical manner.\u00a0 A testing jig was designed and machined so the electron impact ionizers would have electrical connections to the power supplies and compatibility with our in-house characterization system.\u00a0 After validating the functionality of the ionizer with a macro-scaled quadrupole and a Channeltron electron multiplier, we plan to use our chip-scaled quadrupole instead of the macro-version.\u00a0 Once these two vital components are well characterized, we will check the functionality of the electrometer with a commercial ion source and a macro-scaled quadrupole.\u00a0 Finally, we will put all three components together to be tested and characterized in a vacuum chamber.<\/p>\n

\r\nReferences
  1. L.F. Vel\u00e1squez-Garc\u00eda, B. Gassend, and A.I. Akinwande, \u201cCNT-Based Gas Ionizers with Integrated MEMS Gate for Portable Mass Spectrometry,\u201d in Technical Digest of<\/em> Transducers<\/em>, Denver, CO, June 2009, pp. 1646-1649. [↩<\/a>]<\/li>
  2. K. Cheung, L.F. Vel\u00e1squez-Garc\u00eda, and A.I. Akinwande, \u201cHigh Performance MEMS Square Electrode Quadrupole Mass Filter for Portable Mass Spectrometry,\u201d Technical Digest of the 23rd<\/sup> IEEE International Conference on Micro Electro Mechanical Systems MEMS 2010<\/em>, Hong Kong SAR, China, pp. 867-870. [↩<\/a>]<\/li>
  3. Y. Zhu, J. Lee, and A. Seshia, \u201cSystem-level simulation of a micromachined electrometer using a time-domain variable capacitor circuit model,\u201d Journal of Micromechanics and Microengineering<\/em>, vol. 17, pp. 1059-1065, 2007. [↩<\/a>]<\/li>
  4. R.A. Miller, E.G. Nazarov, G.A. Eiceman, and A.T. King, \u201cA MEMS radio-frequency ion mobility spectrometer for chemical vapor detection,\u201d Sensors and Actuators A<\/em>, vol. 91, pp. 301-312, 2001. [↩<\/a>]<\/li>
  5. E. Wapelhorst, J-P. Hauschild, and J. M\u00fcller, \u201cComplex MEMS: a fully integrated TOF micro mass spectrometer,\u201d Sensors and Actuators A<\/em>, vol. 138, pp. 22-27, 2007. [↩<\/a>]<\/li><\/ol><\/div>","protected":false},"excerpt":{"rendered":"

    The Micro-Gas Analyzer Project attempts to leverage the cost reduction, performance enhancement, and increased portability associated with MEMS to create…<\/p>\n<\/div>","protected":false},"author":2,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[29],"tags":[4064,4159,71,23],"_links":{"self":[{"href":"https:\/\/wpmu2.mit.local\/wp-json\/wp\/v2\/posts\/1524"}],"collection":[{"href":"https:\/\/wpmu2.mit.local\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/wpmu2.mit.local\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/wpmu2.mit.local\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/wpmu2.mit.local\/wp-json\/wp\/v2\/comments?post=1524"}],"version-history":[{"count":3,"href":"https:\/\/wpmu2.mit.local\/wp-json\/wp\/v2\/posts\/1524\/revisions"}],"predecessor-version":[{"id":1529,"href":"https:\/\/wpmu2.mit.local\/wp-json\/wp\/v2\/posts\/1524\/revisions\/1529"}],"wp:attachment":[{"href":"https:\/\/wpmu2.mit.local\/wp-json\/wp\/v2\/media?parent=1524"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/wpmu2.mit.local\/wp-json\/wp\/v2\/categories?post=1524"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/wpmu2.mit.local\/wp-json\/wp\/v2\/tags?post=1524"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}