Microelectromechanical Systems
- Wafer Bond Alignment and Strength
Characterization
- Microfabricated Cell Analysis
Device
- Development of Monolithic
Biomolecule Analysis Device
- A Robust Microfabricated Field-effect
Sensor for Monitoring Molecular Adsorption in Liquids
- A Vacuum- Bonding Process
for Packaging of High Temperature
- Microreactors
- Microfabricated Fluidic
Devices for Cell Lysis and Subcellular Component Separations
- Microelectromechanical Thin Film
Stress Sensors
- Tunable Lenses
- Electrostatically Tunable Diffractive
Lenses
- Analog Tunable Gratings - A Piezoelectric
Implementation with Nanometer Deformation
- Vibration-To-Electric Energy
Conversion
- MEM Analog Tunable Gratings
by Electrostatic Actuation
- The Polychromator: A MEMS Correlation
Spectrometer
- Power MEMS Materials and Structures
- Micro Electric Machines
for Micro Turbomachinery
- A Micromachined Valve for Power MEMS
- Reliability of MEMS Devices
in Shock Environments
- Micro Magnetic Machines for
Micro Turbomachinery
- Design and Characterization
of Robust Hot Film Sensors for Tactical Aircraft Inlets
- Sub-10 cm3 Interferometric
Accelerometer with Nano-g Resolution
- Wafer Bonding Technologies
- Development of Hydrocarbon-Fueled
Silicon Combustors for Micro Gas Turbine Engines
- Bistable Micro Relays
- CAD for Microelectromechanical
Systems
- MicroChemical Systems-Multiphase
Reactions
- Microreactors for Catalyst
Testing
- MicroChemical Systems for Direct
Fluorination of Aromatics
- Thermophotovoltaic Generation
of Electricity in MicroFuel Converters
- MicroChemical Systems for
Separations
- Fuel Processing in Microfabricated
Chemical Systems
- Precision Passive Mechanical
Alignment of Wafers
- Platforms for Rapid Screening
and Analysis of Biological and Chemical Processes
- Microchemical Systems for Fuel
Processing and Conversion to Electrical Power
- Micromachined Rocket Engines